JPS5549274A - Manufacturing method for multi-nozzle orifice plate - Google Patents
Manufacturing method for multi-nozzle orifice plateInfo
- Publication number
- JPS5549274A JPS5549274A JP12250878A JP12250878A JPS5549274A JP S5549274 A JPS5549274 A JP S5549274A JP 12250878 A JP12250878 A JP 12250878A JP 12250878 A JP12250878 A JP 12250878A JP S5549274 A JPS5549274 A JP S5549274A
- Authority
- JP
- Japan
- Prior art keywords
- orifice
- orifice plate
- grinding
- etching
- sections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 3
- 239000013078 crystal Substances 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Nozzles (AREA)
- Weting (AREA)
Abstract
PURPOSE:To obtain a precise, high-density and long-sized indented type orifice simply by etching a single-crystal plate anisotropically to form many mesa sections, forming an orifice plate layer using the mesa sections as projected type masters and the grinding the surface. CONSTITUTION:For example, an etching protective film 2 (e.g. an Si2O4 film with a thickness ranging from 4000-5000Angstrom ) is formed on an Si single-crystal plate 1. And then, a hole-opening pattern is prepared by using photoligthographic technology, etc., and mesa sections 12 with the hole-opening sections as the tops are provided by using anisotropic etching. After removing the protective film 2, Cu, etc. 3 is soldered to be used as a mark at the time of grinding, and it is also coated with an exfoliating agent 4 to enable it to easily come off a mold. And then, an orifice platemaking material 5 is poured into that, and it is roughly ground up to the mark 3. After completion of precision grinding, an orifice plate 5A is exfoliated so that a multi-nozzle orifice plate 5A provided with an orifice 7 is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12250878A JPS6043308B2 (en) | 1978-10-06 | 1978-10-06 | How to make a multi-nozzle orifice plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12250878A JPS6043308B2 (en) | 1978-10-06 | 1978-10-06 | How to make a multi-nozzle orifice plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5549274A true JPS5549274A (en) | 1980-04-09 |
JPS6043308B2 JPS6043308B2 (en) | 1985-09-27 |
Family
ID=14837576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12250878A Expired JPS6043308B2 (en) | 1978-10-06 | 1978-10-06 | How to make a multi-nozzle orifice plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6043308B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4612554A (en) * | 1985-07-29 | 1986-09-16 | Xerox Corporation | High density thermal ink jet printhead |
JPH0278559A (en) * | 1988-06-21 | 1990-03-19 | Canon Inc | Orifice plate for ink jet recording head, ink jet recording head using the same plate, and ink jet recorder using the same head |
US5508725A (en) * | 1989-09-18 | 1996-04-16 | Canon Kabushiki Kaisha | Ink jet head having trapezoidal ink passages, ink cartridge and recording apparatus with same |
KR100735992B1 (en) | 2004-12-08 | 2007-07-06 | 세이코 엡슨 가부시키가이샤 | Method for manufacturing droplet ejection head, droplet ejection head, and droplet ejection apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02118512U (en) * | 1989-03-10 | 1990-09-25 |
-
1978
- 1978-10-06 JP JP12250878A patent/JPS6043308B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4612554A (en) * | 1985-07-29 | 1986-09-16 | Xerox Corporation | High density thermal ink jet printhead |
JPH0278559A (en) * | 1988-06-21 | 1990-03-19 | Canon Inc | Orifice plate for ink jet recording head, ink jet recording head using the same plate, and ink jet recorder using the same head |
US5508725A (en) * | 1989-09-18 | 1996-04-16 | Canon Kabushiki Kaisha | Ink jet head having trapezoidal ink passages, ink cartridge and recording apparatus with same |
KR100735992B1 (en) | 2004-12-08 | 2007-07-06 | 세이코 엡슨 가부시키가이샤 | Method for manufacturing droplet ejection head, droplet ejection head, and droplet ejection apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6043308B2 (en) | 1985-09-27 |
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