JPS5546197A - Current meter - Google Patents
Current meterInfo
- Publication number
- JPS5546197A JPS5546197A JP12374279A JP12374279A JPS5546197A JP S5546197 A JPS5546197 A JP S5546197A JP 12374279 A JP12374279 A JP 12374279A JP 12374279 A JP12374279 A JP 12374279A JP S5546197 A JPS5546197 A JP S5546197A
- Authority
- JP
- Japan
- Prior art keywords
- current meter
- meter
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/01—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by using swirlflowmeter
Landscapes
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19782842559 DE2842559A1 (en) | 1978-09-27 | 1978-09-27 | Flow velocity in pipe measuring device - has obstacle generating Eddies and sensor detecting and displaying resultant oscillations |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5546197A true JPS5546197A (en) | 1980-03-31 |
Family
ID=6050920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12374279A Pending JPS5546197A (en) | 1978-09-27 | 1979-09-26 | Current meter |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5546197A (en) |
DE (1) | DE2842559A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170113244A (en) | 2016-03-29 | 2017-10-12 | 가부시키가이샤 히다치 고쿠사이 덴키 | Substrate processing apparatus, device management controller, and program |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3516871A1 (en) * | 1985-04-23 | 1986-10-30 | Robert Bosch Gmbh, 7000 Stuttgart | Flow meter |
-
1978
- 1978-09-27 DE DE19782842559 patent/DE2842559A1/en not_active Withdrawn
-
1979
- 1979-09-26 JP JP12374279A patent/JPS5546197A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170113244A (en) | 2016-03-29 | 2017-10-12 | 가부시키가이샤 히다치 고쿠사이 덴키 | Substrate processing apparatus, device management controller, and program |
KR20200013000A (en) | 2016-03-29 | 2020-02-05 | 가부시키가이샤 코쿠사이 엘렉트릭 | Substrate processing apparatus, device management controller, and program |
Also Published As
Publication number | Publication date |
---|---|
DE2842559A1 (en) | 1980-04-17 |
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