JPS5543472Y2 - - Google Patents

Info

Publication number
JPS5543472Y2
JPS5543472Y2 JP12691179U JP12691179U JPS5543472Y2 JP S5543472 Y2 JPS5543472 Y2 JP S5543472Y2 JP 12691179 U JP12691179 U JP 12691179U JP 12691179 U JP12691179 U JP 12691179U JP S5543472 Y2 JPS5543472 Y2 JP S5543472Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12691179U
Other languages
Japanese (ja)
Other versions
JPS5544381U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12691179U priority Critical patent/JPS5543472Y2/ja
Publication of JPS5544381U publication Critical patent/JPS5544381U/ja
Application granted granted Critical
Publication of JPS5543472Y2 publication Critical patent/JPS5543472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP12691179U 1979-09-17 1979-09-17 Expired JPS5543472Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12691179U JPS5543472Y2 (en) 1979-09-17 1979-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12691179U JPS5543472Y2 (en) 1979-09-17 1979-09-17

Publications (2)

Publication Number Publication Date
JPS5544381U JPS5544381U (en) 1980-03-22
JPS5543472Y2 true JPS5543472Y2 (en) 1980-10-13

Family

ID=29089189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12691179U Expired JPS5543472Y2 (en) 1979-09-17 1979-09-17

Country Status (1)

Country Link
JP (1) JPS5543472Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Also Published As

Publication number Publication date
JPS5544381U (en) 1980-03-22

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