JPS5543226A - Pump - Google Patents

Pump

Info

Publication number
JPS5543226A
JPS5543226A JP11509578A JP11509578A JPS5543226A JP S5543226 A JPS5543226 A JP S5543226A JP 11509578 A JP11509578 A JP 11509578A JP 11509578 A JP11509578 A JP 11509578A JP S5543226 A JPS5543226 A JP S5543226A
Authority
JP
Japan
Prior art keywords
movable membrane
electrode
valve
pump chamber
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11509578A
Other languages
Japanese (ja)
Inventor
Shuji Suzuki
Hiroki Honda
Hirohiko Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11509578A priority Critical patent/JPS5543226A/en
Publication of JPS5543226A publication Critical patent/JPS5543226A/en
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Abstract

PURPOSE: To enable the volume of a pump to be controlled by varying the voltage and the frequency of AC signals and to enable suction and discharge with high accuracy and to enable miniaturization and to obtain a light-weight pump by allowing a movable membrane to be operated directly by means of AC signals.
CONSTITUTION: When positive voltage is impressed to the electrode 3 of a movable membrane 15, and negative voltage to the electrode 4, a piezo-electric film 1 elongates according to the relation between the direction of polarization of the piezo- electric film and the plolarity of impression voltage, and a piezo-electric film 2 contracts, so the movable membrane 15 becomes convex upward. As a result of this, the air having the volume of movement of the movable membrane 15 passes through a valve 13 and is discharged outside from a pump chamber A, and at the same time, the same amount of air is drawn into a pump chamber B through a valve 12. Next, when a negative voltage is impressed to the electrode 3 of the movable membrane 15 and a positive voltage to the electrode 4, the movable membrane 15 becomes concaved downward, and the air is discharged from the pump chamber B, passing through a valve 14, and drawn into the pump chamber A through a valve 11, and thus pumping action is performed with high accuracy.
COPYRIGHT: (C)1980,JPO&Japio
JP11509578A 1978-09-21 1978-09-21 Pump Pending JPS5543226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11509578A JPS5543226A (en) 1978-09-21 1978-09-21 Pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11509578A JPS5543226A (en) 1978-09-21 1978-09-21 Pump

Publications (1)

Publication Number Publication Date
JPS5543226A true JPS5543226A (en) 1980-03-27

Family

ID=14654074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11509578A Pending JPS5543226A (en) 1978-09-21 1978-09-21 Pump

Country Status (1)

Country Link
JP (1) JPS5543226A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168447U (en) * 1984-04-16 1985-11-08 三菱電機株式会社 wall-mounted vacuum cleaner
JPS60195987U (en) * 1984-06-08 1985-12-27 株式会社三鈴エリー piezoelectric vibrator pump
JPS60195986U (en) * 1984-06-08 1985-12-27 株式会社三鈴エリー piezoelectric vibrator pump
JPS6177767U (en) * 1984-10-26 1986-05-24
JPS61115488U (en) * 1984-12-29 1986-07-21
US4648807A (en) * 1985-05-14 1987-03-10 The Garrett Corporation Compact piezoelectric fluidic air supply pump
JPS62186077A (en) * 1986-02-10 1987-08-14 Misuzu Erii:Kk Driving method for piezoelectric pump
US4708600A (en) * 1986-02-24 1987-11-24 Abujudom Ii David N Piezoelectric fluid pumping apparatus
JPH02119984U (en) * 1989-03-15 1990-09-27

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324606A (en) * 1976-08-19 1978-03-07 Koukuu Uchiyuu Gijiyutsu Kenki Biimorph vibrator pumps

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324606A (en) * 1976-08-19 1978-03-07 Koukuu Uchiyuu Gijiyutsu Kenki Biimorph vibrator pumps

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168447U (en) * 1984-04-16 1985-11-08 三菱電機株式会社 wall-mounted vacuum cleaner
JPS6337001Y2 (en) * 1984-04-16 1988-09-30
JPS60195987U (en) * 1984-06-08 1985-12-27 株式会社三鈴エリー piezoelectric vibrator pump
JPS60195986U (en) * 1984-06-08 1985-12-27 株式会社三鈴エリー piezoelectric vibrator pump
JPS6177767U (en) * 1984-10-26 1986-05-24
JPS61115488U (en) * 1984-12-29 1986-07-21
US4648807A (en) * 1985-05-14 1987-03-10 The Garrett Corporation Compact piezoelectric fluidic air supply pump
JPS62186077A (en) * 1986-02-10 1987-08-14 Misuzu Erii:Kk Driving method for piezoelectric pump
US4708600A (en) * 1986-02-24 1987-11-24 Abujudom Ii David N Piezoelectric fluid pumping apparatus
JPH02119984U (en) * 1989-03-15 1990-09-27

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