JPS5542416B2 - - Google Patents
Info
- Publication number
- JPS5542416B2 JPS5542416B2 JP4844475A JP4844475A JPS5542416B2 JP S5542416 B2 JPS5542416 B2 JP S5542416B2 JP 4844475 A JP4844475 A JP 4844475A JP 4844475 A JP4844475 A JP 4844475A JP S5542416 B2 JPS5542416 B2 JP S5542416B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
- B23Q1/623—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/34—Director, elements to supervisory
- G05B2219/34242—For measurement only
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37272—Capacitive
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41105—Coarse fine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41344—Piezo, electrostrictive linear drive
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41345—Micropositioner
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41457—Superposition of movement
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45026—Circuit board, pcb
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50046—Control of level, horizontal, inclination of workholder, slide
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50151—Orient, translate, align workpiece to fit position assumed in program
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Human Computer Interaction (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Linear Motors (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50048444A JPS51123565A (en) | 1975-04-21 | 1975-04-21 | Three-dimention-position differential adjustment of processing article |
FR7611605A FR2308465A1 (fr) | 1975-04-21 | 1976-04-20 | Dispositif de positionnement fin d'une piece |
GB15789/76A GB1502931A (en) | 1975-04-21 | 1976-04-20 | Position finely adjusting apparatus |
US05/678,673 US4087729A (en) | 1975-04-21 | 1976-04-20 | Position finely adjusting apparatus |
CH497076A CH609901A5 (ja) | 1975-04-21 | 1976-04-21 | |
DE2617312A DE2617312B2 (de) | 1975-04-21 | 1976-04-21 | Vorrichtun g zur Feineinstellung |
NL7604241A NL7604241A (nl) | 1975-04-21 | 1976-04-21 | Fijninstelinrichting. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50048444A JPS51123565A (en) | 1975-04-21 | 1975-04-21 | Three-dimention-position differential adjustment of processing article |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51123565A JPS51123565A (en) | 1976-10-28 |
JPS5542416B2 true JPS5542416B2 (ja) | 1980-10-30 |
Family
ID=12803508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50048444A Granted JPS51123565A (en) | 1975-04-21 | 1975-04-21 | Three-dimention-position differential adjustment of processing article |
Country Status (7)
Country | Link |
---|---|
US (1) | US4087729A (ja) |
JP (1) | JPS51123565A (ja) |
CH (1) | CH609901A5 (ja) |
DE (1) | DE2617312B2 (ja) |
FR (1) | FR2308465A1 (ja) |
GB (1) | GB1502931A (ja) |
NL (1) | NL7604241A (ja) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55121640A (en) * | 1979-03-13 | 1980-09-18 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Mask alignment method |
IL59629A (en) * | 1979-05-11 | 1983-03-31 | Electromask Inc | Apparatus and process for photoexposing semiconductor wafers |
JPS5788444A (en) * | 1980-11-25 | 1982-06-02 | Ushio Inc | Projection device |
US5610810A (en) * | 1981-09-06 | 1997-03-11 | Canon Kabushiki Kaisha | Apparatus for correcting errors in a digital-to-analog converter |
US4449084A (en) * | 1981-12-28 | 1984-05-15 | University Of Pittsburgh | Positioning servo-mechanism or tachometer employing self-scanning light sensing array |
US4627009A (en) * | 1983-05-24 | 1986-12-02 | Nanometrics Inc. | Microscope stage assembly and control system |
US4506205A (en) * | 1983-06-10 | 1985-03-19 | The Perkin-Elmer Corporation | Electro-magnetic alignment apparatus |
US4485339A (en) * | 1983-06-10 | 1984-11-27 | The Perkin-Elmer Corporation | Electro-magnetic alignment device |
US4507597A (en) * | 1983-06-10 | 1985-03-26 | The Perkin-Elmer Corporation | Electro-magnetic alignment assemblies |
US4506204A (en) * | 1983-06-10 | 1985-03-19 | The Perkin-Elmer Corporation | Electro-magnetic apparatus |
US4544889A (en) * | 1983-09-12 | 1985-10-01 | International Business Machines Corporation | Robot precision probe positioner with guidance optics |
DE3343340C1 (de) * | 1983-11-30 | 1985-06-13 | Max Planck Gesellschaft | Linearverstellvorrichtung |
US4585337A (en) * | 1985-01-14 | 1986-04-29 | Phillips Edward H | Step-and-repeat alignment and exposure system |
US4686440A (en) * | 1985-03-11 | 1987-08-11 | Yotaro Hatamura | Fine positioning device |
NL8600785A (nl) * | 1986-03-27 | 1987-10-16 | Asm Lithography Bv | Positioneerinrichting met een z-manipulator en een o-manipulator. |
DE3732566A1 (de) * | 1986-09-26 | 1988-04-07 | Fraunhofer Ges Forschung | Feinpositioniermodul |
GB8713050D0 (en) * | 1987-06-04 | 1987-07-08 | Renishaw Plc | Positioning apparatus |
US4952858A (en) * | 1988-05-18 | 1990-08-28 | Galburt Daniel N | Microlithographic apparatus |
JP2960423B2 (ja) * | 1988-11-16 | 1999-10-06 | 株式会社日立製作所 | 試料移動装置及び半導体製造装置 |
JPH07108101B2 (ja) * | 1989-02-28 | 1995-11-15 | オ−クマ株式会社 | リニアアクチュエータ駆動制御装置 |
US5140242A (en) * | 1990-04-30 | 1992-08-18 | International Business Machines Corporation | Servo guided stage system |
US5157296A (en) * | 1990-12-20 | 1992-10-20 | Massachusetts Institute Of Technology | Bearing for use in high resolution precision control device |
WO1995007793A2 (en) * | 1993-09-13 | 1995-03-23 | United Technologies Corporation | Force and position controlled manipulator |
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US5874820A (en) * | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US6989647B1 (en) | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US6246204B1 (en) | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
US6008500A (en) * | 1995-04-04 | 1999-12-28 | Nikon Corporation | Exposure apparatus having dynamically isolated reaction frame |
TW318255B (ja) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
US5760564A (en) * | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
JPH10521A (ja) * | 1996-06-07 | 1998-01-06 | Nikon Corp | 支持装置 |
JP3683370B2 (ja) * | 1997-01-10 | 2005-08-17 | 富士通株式会社 | 電子ビーム露光装置 |
JP3886777B2 (ja) * | 2001-11-02 | 2007-02-28 | 日本電子株式会社 | 電子線照射装置および方法 |
TWI252809B (en) * | 2004-05-05 | 2006-04-11 | Bobst Sa | Method and device for initial adjustment of the register of the engraved cylinders of a rotary multicolour press |
US7170203B2 (en) * | 2004-05-06 | 2007-01-30 | The Hong Kong Polytechnic University | Two-dimensional variable reluctance planar motor |
TWI531806B (zh) * | 2014-09-18 | 2016-05-01 | 溫瓌岸 | 兩用共振型磁力計 |
CN104440836B (zh) * | 2014-10-29 | 2015-12-30 | 哈尔滨工业大学 | 基于密珠环形支承与双轴复合驱动的空间两自由度调整方法与装置 |
US11097401B2 (en) * | 2017-04-27 | 2021-08-24 | Magswitch Technology Worldwide Pty Ltd. | Magnetic coupling device with at least one of a sensor arrangement and a degauss capability |
CN115072421A (zh) * | 2022-07-22 | 2022-09-20 | 苏州欧瑞杰智能科技有限公司 | 一种适用于贴膜设备的吸盘装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3786332A (en) * | 1969-03-19 | 1974-01-15 | Thomson Houston Comp Francaise | Micro positioning apparatus |
US3733484A (en) * | 1969-10-29 | 1973-05-15 | Walter C Mc Crone Associates I | Control for electron microprobe |
US3789285A (en) * | 1972-03-27 | 1974-01-29 | Handotai Kenkyu Shinkokai | Position control system using magnetic force |
US3889164A (en) * | 1973-01-24 | 1975-06-10 | Handotai Kenkyu Shinkokai | Position control system using magnetic forces for correcting the inclination of a controlled member including a torsional mounting |
US3904945A (en) * | 1973-09-10 | 1975-09-09 | Ibm | Precision tool and workpiece positioning apparatus |
-
1975
- 1975-04-21 JP JP50048444A patent/JPS51123565A/ja active Granted
-
1976
- 1976-04-20 US US05/678,673 patent/US4087729A/en not_active Expired - Lifetime
- 1976-04-20 FR FR7611605A patent/FR2308465A1/fr active Granted
- 1976-04-20 GB GB15789/76A patent/GB1502931A/en not_active Expired
- 1976-04-21 CH CH497076A patent/CH609901A5/xx not_active IP Right Cessation
- 1976-04-21 DE DE2617312A patent/DE2617312B2/de active Granted
- 1976-04-21 NL NL7604241A patent/NL7604241A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
GB1502931A (en) | 1978-03-08 |
FR2308465A1 (fr) | 1976-11-19 |
DE2617312C3 (ja) | 1980-06-19 |
NL7604241A (nl) | 1976-10-25 |
FR2308465B1 (ja) | 1979-05-04 |
CH609901A5 (ja) | 1979-03-30 |
JPS51123565A (en) | 1976-10-28 |
US4087729A (en) | 1978-05-02 |
DE2617312A1 (de) | 1976-11-04 |
DE2617312B2 (de) | 1979-09-27 |