JPS553643Y2 - - Google Patents

Info

Publication number
JPS553643Y2
JPS553643Y2 JP14283172U JP14283172U JPS553643Y2 JP S553643 Y2 JPS553643 Y2 JP S553643Y2 JP 14283172 U JP14283172 U JP 14283172U JP 14283172 U JP14283172 U JP 14283172U JP S553643 Y2 JPS553643 Y2 JP S553643Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14283172U
Other languages
Japanese (ja)
Other versions
JPS4999158U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14283172U priority Critical patent/JPS553643Y2/ja
Publication of JPS4999158U publication Critical patent/JPS4999158U/ja
Application granted granted Critical
Publication of JPS553643Y2 publication Critical patent/JPS553643Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP14283172U 1972-12-12 1972-12-12 Expired JPS553643Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14283172U JPS553643Y2 (ko) 1972-12-12 1972-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14283172U JPS553643Y2 (ko) 1972-12-12 1972-12-12

Publications (2)

Publication Number Publication Date
JPS4999158U JPS4999158U (ko) 1974-08-27
JPS553643Y2 true JPS553643Y2 (ko) 1980-01-28

Family

ID=28424778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14283172U Expired JPS553643Y2 (ko) 1972-12-12 1972-12-12

Country Status (1)

Country Link
JP (1) JPS553643Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9343263B2 (en) 2014-03-14 2016-05-17 Sumitomo Heavy Industries Ion Technology Co., Ltd. Ion implanter, beam energy measuring device, and method of measuring beam energy

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358769A (en) * 1976-11-08 1978-05-26 Fujitsu Ltd Ion injector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9343263B2 (en) 2014-03-14 2016-05-17 Sumitomo Heavy Industries Ion Technology Co., Ltd. Ion implanter, beam energy measuring device, and method of measuring beam energy

Also Published As

Publication number Publication date
JPS4999158U (ko) 1974-08-27

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