JPS5525762B2 - - Google Patents
Info
- Publication number
- JPS5525762B2 JPS5525762B2 JP15484675A JP15484675A JPS5525762B2 JP S5525762 B2 JPS5525762 B2 JP S5525762B2 JP 15484675 A JP15484675 A JP 15484675A JP 15484675 A JP15484675 A JP 15484675A JP S5525762 B2 JPS5525762 B2 JP S5525762B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15484675A JPS5279952A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15484675A JPS5279952A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5279952A JPS5279952A (en) | 1977-07-05 |
| JPS5525762B2 true JPS5525762B2 (de) | 1980-07-08 |
Family
ID=15593165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15484675A Granted JPS5279952A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5279952A (de) |
-
1975
- 1975-12-26 JP JP15484675A patent/JPS5279952A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5279952A (en) | 1977-07-05 |