JPS5518996Y2 - - Google Patents

Info

Publication number
JPS5518996Y2
JPS5518996Y2 JP17071676U JP17071676U JPS5518996Y2 JP S5518996 Y2 JPS5518996 Y2 JP S5518996Y2 JP 17071676 U JP17071676 U JP 17071676U JP 17071676 U JP17071676 U JP 17071676U JP S5518996 Y2 JPS5518996 Y2 JP S5518996Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17071676U
Other languages
Japanese (ja)
Other versions
JPS5385963U (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17071676U priority Critical patent/JPS5518996Y2/ja
Publication of JPS5385963U publication Critical patent/JPS5385963U/ja
Application granted granted Critical
Publication of JPS5518996Y2 publication Critical patent/JPS5518996Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP17071676U 1976-12-16 1976-12-16 Expired JPS5518996Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17071676U JPS5518996Y2 (fi) 1976-12-16 1976-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17071676U JPS5518996Y2 (fi) 1976-12-16 1976-12-16

Publications (2)

Publication Number Publication Date
JPS5385963U JPS5385963U (fi) 1978-07-15
JPS5518996Y2 true JPS5518996Y2 (fi) 1980-05-06

Family

ID=28778256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17071676U Expired JPS5518996Y2 (fi) 1976-12-16 1976-12-16

Country Status (1)

Country Link
JP (1) JPS5518996Y2 (fi)

Also Published As

Publication number Publication date
JPS5385963U (fi) 1978-07-15

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