JPS55163857A - Pool device for semiconductor wafer carrier - Google Patents
Pool device for semiconductor wafer carrierInfo
- Publication number
- JPS55163857A JPS55163857A JP7279479A JP7279479A JPS55163857A JP S55163857 A JPS55163857 A JP S55163857A JP 7279479 A JP7279479 A JP 7279479A JP 7279479 A JP7279479 A JP 7279479A JP S55163857 A JPS55163857 A JP S55163857A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor wafer
- flange
- frame
- insides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
PURPOSE:To stereoscopically pool a semiconductor wafer by engaging a frame elevationally movable with the flange of a semiconductor wafer carrier at the insides of both sides thereof and providing a bridge for raising the carrier. CONSTITUTION:A carrier 2 having a flange 3 for containing an conveying semiconductor wafer 4 is conveyed with a belt conveyor 1. Both side plates 6 provided laterally at the belt conveyor 1 and a stay 7 are elevationally movable with a feed thread 11 and a motor 12, key-state bridges 8a-8c are provided at the insides of both side plates 6, and a light shielding plate 13 perforated with holes 14a-15c is provided thereat. There are provided light emitting unit 16, 17 and photoreceptors at both sides of the plate 13. When pooling the carrier 2, the frame 5 is raised to stop the flange 3 of the carrier 2 with the key of the bridge 8a, and the frame 5 is further raised to raise and retain the flange 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7279479A JPS55163857A (en) | 1979-06-08 | 1979-06-08 | Pool device for semiconductor wafer carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7279479A JPS55163857A (en) | 1979-06-08 | 1979-06-08 | Pool device for semiconductor wafer carrier |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55163857A true JPS55163857A (en) | 1980-12-20 |
Family
ID=13499644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7279479A Pending JPS55163857A (en) | 1979-06-08 | 1979-06-08 | Pool device for semiconductor wafer carrier |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55163857A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6558101B2 (en) | 2001-02-22 | 2003-05-06 | Daifuku Co., Ltd. | Article storage system |
-
1979
- 1979-06-08 JP JP7279479A patent/JPS55163857A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6558101B2 (en) | 2001-02-22 | 2003-05-06 | Daifuku Co., Ltd. | Article storage system |
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