JPS55155455A - Pulse electron beam generating method - Google Patents
Pulse electron beam generating methodInfo
- Publication number
- JPS55155455A JPS55155455A JP6241979A JP6241979A JPS55155455A JP S55155455 A JPS55155455 A JP S55155455A JP 6241979 A JP6241979 A JP 6241979A JP 6241979 A JP6241979 A JP 6241979A JP S55155455 A JPS55155455 A JP S55155455A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- pulse electron
- voltage
- conductor plate
- generating method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title 1
- 239000004020 conductor Substances 0.000 abstract 4
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To finely trim the timing of the pulse electron beam by applying a step- voltage to one conductor plate and a direct current voltage to the other conductor plate. CONSTITUTION:A conductor plate 1 is connected with a step voltage generator 3. By varying the DC voltage applied to the conductor plate 1, the timing of the pulse electron beam can be trimmed. A pulse electron beam can be also generated by the step-voltage of one-side polarity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6241979A JPS55155455A (en) | 1979-05-21 | 1979-05-21 | Pulse electron beam generating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6241979A JPS55155455A (en) | 1979-05-21 | 1979-05-21 | Pulse electron beam generating method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55155455A true JPS55155455A (en) | 1980-12-03 |
Family
ID=13199605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6241979A Pending JPS55155455A (en) | 1979-05-21 | 1979-05-21 | Pulse electron beam generating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55155455A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50140994A (en) * | 1974-04-22 | 1975-11-12 | ||
JPS5358770A (en) * | 1976-11-08 | 1978-05-26 | Jeol Ltd | Electron beam exposure apparatus |
-
1979
- 1979-05-21 JP JP6241979A patent/JPS55155455A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50140994A (en) * | 1974-04-22 | 1975-11-12 | ||
JPS5358770A (en) * | 1976-11-08 | 1978-05-26 | Jeol Ltd | Electron beam exposure apparatus |
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