JPS55124057A - Semiconductor gas sensor - Google Patents

Semiconductor gas sensor

Info

Publication number
JPS55124057A
JPS55124057A JP3249579A JP3249579A JPS55124057A JP S55124057 A JPS55124057 A JP S55124057A JP 3249579 A JP3249579 A JP 3249579A JP 3249579 A JP3249579 A JP 3249579A JP S55124057 A JPS55124057 A JP S55124057A
Authority
JP
Japan
Prior art keywords
layer
substrate
lead wires
alumina
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3249579A
Other languages
Japanese (ja)
Inventor
Yasuhiro Otsuka
Hiroshi Shinohara
Shinichi Matsumoto
Hisanobu Furuya
Hiroshi Wakizaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP3249579A priority Critical patent/JPS55124057A/en
Publication of JPS55124057A publication Critical patent/JPS55124057A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To make possible measurement even at low temperature by burying a heating element within a heat-resistant substrate, opposedly disposing two lead wires on the substrate surface, providing a semiconductor layer whose resistance value changes with the oxygen partial pressure covering the end portion of the lead wires and providing a catalyst layer thereon. CONSTITUTION:In the gas sensor for detecting the O2 concentration in the exhaust gas from the engine, particularly Diesel engine of automobiles, etc., a heating element 5 of Pt or the like is buried in a heat-resistant substrate 1 of alumina or the like and lead wires 2, 3 are opposedly disposed on the substrate 1 surface. A P-type semiconductor layer 3 of porosities 30-50% whose resistance value changes with the O2 concentration of the exhaust gas such as NiO is formed at the end parts of the wires 2, 2. An alumina catalyst layer 9 carrying one or more kinds of Pt, Pd, Rh at 3-10wt% is provided on the layer 3 and a dense alumina coat layer 7a covering the lead wires 2, 2 and a coarse alumina coat layer 7b on 7a are formed. The surface of the substrate 1 other than the layer 8 on its arm part 1' surface is coated with a dense alumina layer. Further the input terminal 6 of the heating element input wire 5 and the output wire teminal 4 of the semiconductor layer 8 are provided respectively.
JP3249579A 1979-03-20 1979-03-20 Semiconductor gas sensor Pending JPS55124057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3249579A JPS55124057A (en) 1979-03-20 1979-03-20 Semiconductor gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3249579A JPS55124057A (en) 1979-03-20 1979-03-20 Semiconductor gas sensor

Publications (1)

Publication Number Publication Date
JPS55124057A true JPS55124057A (en) 1980-09-24

Family

ID=12360569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3249579A Pending JPS55124057A (en) 1979-03-20 1979-03-20 Semiconductor gas sensor

Country Status (1)

Country Link
JP (1) JPS55124057A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158346A (en) * 1984-01-30 1985-08-19 Ngk Spark Plug Co Ltd Gas sensor
EP0610884A1 (en) * 1993-02-10 1994-08-17 Toyota Jidosha Kabushiki Kaisha Oxygen concentration sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158346A (en) * 1984-01-30 1985-08-19 Ngk Spark Plug Co Ltd Gas sensor
JPH0418619B2 (en) * 1984-01-30 1992-03-27 Ngk Spark Plug Co
EP0610884A1 (en) * 1993-02-10 1994-08-17 Toyota Jidosha Kabushiki Kaisha Oxygen concentration sensor
US5445796A (en) * 1993-02-10 1995-08-29 Toyota Jidosha Kabushiki Kaisha Oxygen concentration sensor with heat resistant coating

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