JPS55115252A - Analytical electron microscope - Google Patents
Analytical electron microscopeInfo
- Publication number
- JPS55115252A JPS55115252A JP2277579A JP2277579A JPS55115252A JP S55115252 A JPS55115252 A JP S55115252A JP 2277579 A JP2277579 A JP 2277579A JP 2277579 A JP2277579 A JP 2277579A JP S55115252 A JPS55115252 A JP S55115252A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- point
- rays
- analyzed
- electron rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To remove background automatically and exactly by the procedure in which electron rays are irradiated alternately on a point of sample to be analyzed and a point on a sample holder, permeated electron rays are detected, and difference between both is calculated.
CONSTITUTION: When the point A to be analyzed on a sample is exposed to electron rays, the rays premeate through the sample and the sample holding membrane and signal put in the amplifier 13 through the energy analyzer 11 and the detector 12 is sent to the multichannel analyzer 15A. Then, when the point B on the sample holding membrane is exposed to electron rays, the rays permeate through the sample holding membrane 2 and signal put in the amplifier 13 is sent to the multichannel analyzer 15B. The signals memorized in the analyzers 15A and 15B are subjected to substraction at the substractive circuit 16 and energy spectrum having information on the only point to be analyzed on the sample is displayed on the displayer 17.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2277579A JPS55115252A (en) | 1979-02-28 | 1979-02-28 | Analytical electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2277579A JPS55115252A (en) | 1979-02-28 | 1979-02-28 | Analytical electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55115252A true JPS55115252A (en) | 1980-09-05 |
Family
ID=12092030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2277579A Pending JPS55115252A (en) | 1979-02-28 | 1979-02-28 | Analytical electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55115252A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5780649A (en) * | 1980-11-10 | 1982-05-20 | Hitachi Ltd | Electron ray energy analyzer |
| JP2015520495A (en) * | 2012-06-05 | 2015-07-16 | ビー−ナノ リミテッド | System and method for analyzing materials in a non-vacuum environment using an electron microscope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214117A (en) * | 1975-07-23 | 1977-02-02 | Hitachi Ltd | Gas turbine device |
| JPS532755A (en) * | 1976-06-30 | 1978-01-11 | Masahiko Izumi | Atomosphere conrolling method |
| JPS5339232A (en) * | 1976-09-22 | 1978-04-11 | Mitsubishi Heavy Ind Ltd | Joint welding of skin material and core material |
-
1979
- 1979-02-28 JP JP2277579A patent/JPS55115252A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214117A (en) * | 1975-07-23 | 1977-02-02 | Hitachi Ltd | Gas turbine device |
| JPS532755A (en) * | 1976-06-30 | 1978-01-11 | Masahiko Izumi | Atomosphere conrolling method |
| JPS5339232A (en) * | 1976-09-22 | 1978-04-11 | Mitsubishi Heavy Ind Ltd | Joint welding of skin material and core material |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5780649A (en) * | 1980-11-10 | 1982-05-20 | Hitachi Ltd | Electron ray energy analyzer |
| JPS6329785B2 (en) * | 1980-11-10 | 1988-06-15 | Hitachi Ltd | |
| JP2015520495A (en) * | 2012-06-05 | 2015-07-16 | ビー−ナノ リミテッド | System and method for analyzing materials in a non-vacuum environment using an electron microscope |
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