JPS5494283A - Production system of semiconductor device - Google Patents
Production system of semiconductor deviceInfo
- Publication number
- JPS5494283A JPS5494283A JP88878A JP88878A JPS5494283A JP S5494283 A JPS5494283 A JP S5494283A JP 88878 A JP88878 A JP 88878A JP 88878 A JP88878 A JP 88878A JP S5494283 A JPS5494283 A JP S5494283A
- Authority
- JP
- Japan
- Prior art keywords
- marks
- substrate
- film
- patterns
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To reduce production period and let the system rapidly adapt itself to switching of types by forming marks indicating types, process instructions, etc. on the main surface edge part of semiconductor substrates and reading said patterns.
CONSTITUTION: Laminated films of a SiO2 film 2 and a photo resist film 10 are formed on a Si substrate 1 and a mask 11 having specified patterns are provided thereon, to which exposure and developing are applied to form patterns on the film 10. Next, with the film 10 as a mask, the substrate 1 is etched to form marks on the substrate 1, at which time the end edge parts of the substrate to be discarded later are beforehand selected for the portions to be formed with the marks. After the marks are formed on the substrate 1 in this way, the marks are scanned thereon by the use of He-Ne laser or the like and the kinds of the marks are identified from the differences in the intensities of the light received owing to reflection and scattering. These facilitate process control and make the system suitable for mass production.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP88878A JPS5494283A (en) | 1978-01-10 | 1978-01-10 | Production system of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP88878A JPS5494283A (en) | 1978-01-10 | 1978-01-10 | Production system of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5494283A true JPS5494283A (en) | 1979-07-25 |
Family
ID=11486207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP88878A Pending JPS5494283A (en) | 1978-01-10 | 1978-01-10 | Production system of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5494283A (en) |
-
1978
- 1978-01-10 JP JP88878A patent/JPS5494283A/en active Pending
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