JPS5493378A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5493378A JPS5493378A JP15842977A JP15842977A JPS5493378A JP S5493378 A JPS5493378 A JP S5493378A JP 15842977 A JP15842977 A JP 15842977A JP 15842977 A JP15842977 A JP 15842977A JP S5493378 A JPS5493378 A JP S5493378A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- growing
- curvature
- hole
- radius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
Abstract
PURPOSE: To enable to arbitrarily increase the radius of curvature on the light emitting plane of lens shape, by inserting the GaAs layer between Ga1-xAlxAs layers grown on the GaAs substrate and the GaAs substrate forming the curved surface with epitaxial growing.
CONSTITUTION: The hole 21A of lens shape is formed on the GaAs substrate 21 with conventional photolithography, and the GaAs layer 22 is grown with liquid phase epitaxial growing method etc. With this process, the hole 21A is burried with the layer 22, and the radius of curvature of the hole produced on the growing surface of the layer 22 is increased in proportional with the hole 21A as the growing progresses, and the growing of the layer 22 is stopped with desired radius of curvature. Succeedingly, the Ga1-xAlxAs layer 23 is grown into desired thickness, and the substrate 21 and the layer 22 are removed by immersing it into NH4OH-H2O2 system etching solution, for example. Thus, the Ga1-xAlxAs layer 23 having the desired radius of curvature and of lens shaped emission surface 23, that is, LED can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15842977A JPS5493378A (en) | 1977-12-30 | 1977-12-30 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15842977A JPS5493378A (en) | 1977-12-30 | 1977-12-30 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5493378A true JPS5493378A (en) | 1979-07-24 |
Family
ID=15671557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15842977A Pending JPS5493378A (en) | 1977-12-30 | 1977-12-30 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5493378A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993018428A3 (en) * | 1992-03-13 | 1994-02-17 | Kopin Corp | Head-mounted display system |
US5331149A (en) * | 1990-12-31 | 1994-07-19 | Kopin Corporation | Eye tracking system having an array of photodetectors aligned respectively with an array of pixels |
US5453405A (en) * | 1991-01-18 | 1995-09-26 | Kopin Corporation | Method of making light emitting diode bars and arrays |
US5815126A (en) * | 1993-10-22 | 1998-09-29 | Kopin Corporation | Monocular portable communication and display system |
US6043800A (en) * | 1990-12-31 | 2000-03-28 | Kopin Corporation | Head mounted liquid crystal display system |
US6072445A (en) * | 1990-12-31 | 2000-06-06 | Kopin Corporation | Head mounted color display system |
US6424321B1 (en) | 1993-10-22 | 2002-07-23 | Kopin Corporation | Head-mounted matrix display |
US6448944B2 (en) | 1993-10-22 | 2002-09-10 | Kopin Corporation | Head-mounted matrix display |
US7310072B2 (en) | 1993-10-22 | 2007-12-18 | Kopin Corporation | Portable communication display device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973080A (en) * | 1972-09-25 | 1974-07-15 | ||
JPS5165888A (en) * | 1974-10-29 | 1976-06-07 | Xerox Corp |
-
1977
- 1977-12-30 JP JP15842977A patent/JPS5493378A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973080A (en) * | 1972-09-25 | 1974-07-15 | ||
JPS5165888A (en) * | 1974-10-29 | 1976-06-07 | Xerox Corp |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6072445A (en) * | 1990-12-31 | 2000-06-06 | Kopin Corporation | Head mounted color display system |
US7075501B1 (en) | 1990-12-31 | 2006-07-11 | Kopin Corporation | Head mounted display system |
US5583335A (en) * | 1990-12-31 | 1996-12-10 | Kopin Corporation | Method of making an eye tracking system having an active matrix display |
US6043800A (en) * | 1990-12-31 | 2000-03-28 | Kopin Corporation | Head mounted liquid crystal display system |
US5331149A (en) * | 1990-12-31 | 1994-07-19 | Kopin Corporation | Eye tracking system having an array of photodetectors aligned respectively with an array of pixels |
US5453405A (en) * | 1991-01-18 | 1995-09-26 | Kopin Corporation | Method of making light emitting diode bars and arrays |
US6140980A (en) * | 1992-03-13 | 2000-10-31 | Kopin Corporation | Head-mounted display system |
WO1993018428A3 (en) * | 1992-03-13 | 1994-02-17 | Kopin Corp | Head-mounted display system |
US6636185B1 (en) | 1992-03-13 | 2003-10-21 | Kopin Corporation | Head-mounted display system |
US5815126A (en) * | 1993-10-22 | 1998-09-29 | Kopin Corporation | Monocular portable communication and display system |
US6424321B1 (en) | 1993-10-22 | 2002-07-23 | Kopin Corporation | Head-mounted matrix display |
US6448944B2 (en) | 1993-10-22 | 2002-09-10 | Kopin Corporation | Head-mounted matrix display |
US7310072B2 (en) | 1993-10-22 | 2007-12-18 | Kopin Corporation | Portable communication display device |
US8040292B2 (en) | 1993-10-22 | 2011-10-18 | Kopin Corporation | Portable communication display device |
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