JPS5493378A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5493378A
JPS5493378A JP15842977A JP15842977A JPS5493378A JP S5493378 A JPS5493378 A JP S5493378A JP 15842977 A JP15842977 A JP 15842977A JP 15842977 A JP15842977 A JP 15842977A JP S5493378 A JPS5493378 A JP S5493378A
Authority
JP
Japan
Prior art keywords
layer
growing
curvature
hole
radius
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15842977A
Other languages
Japanese (ja)
Inventor
Shoji Isozumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15842977A priority Critical patent/JPS5493378A/en
Publication of JPS5493378A publication Critical patent/JPS5493378A/en
Pending legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)

Abstract

PURPOSE: To enable to arbitrarily increase the radius of curvature on the light emitting plane of lens shape, by inserting the GaAs layer between Ga1-xAlxAs layers grown on the GaAs substrate and the GaAs substrate forming the curved surface with epitaxial growing.
CONSTITUTION: The hole 21A of lens shape is formed on the GaAs substrate 21 with conventional photolithography, and the GaAs layer 22 is grown with liquid phase epitaxial growing method etc. With this process, the hole 21A is burried with the layer 22, and the radius of curvature of the hole produced on the growing surface of the layer 22 is increased in proportional with the hole 21A as the growing progresses, and the growing of the layer 22 is stopped with desired radius of curvature. Succeedingly, the Ga1-xAlxAs layer 23 is grown into desired thickness, and the substrate 21 and the layer 22 are removed by immersing it into NH4OH-H2O2 system etching solution, for example. Thus, the Ga1-xAlxAs layer 23 having the desired radius of curvature and of lens shaped emission surface 23, that is, LED can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
JP15842977A 1977-12-30 1977-12-30 Manufacture for semiconductor device Pending JPS5493378A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15842977A JPS5493378A (en) 1977-12-30 1977-12-30 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15842977A JPS5493378A (en) 1977-12-30 1977-12-30 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5493378A true JPS5493378A (en) 1979-07-24

Family

ID=15671557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15842977A Pending JPS5493378A (en) 1977-12-30 1977-12-30 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5493378A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993018428A3 (en) * 1992-03-13 1994-02-17 Kopin Corp Head-mounted display system
US5331149A (en) * 1990-12-31 1994-07-19 Kopin Corporation Eye tracking system having an array of photodetectors aligned respectively with an array of pixels
US5453405A (en) * 1991-01-18 1995-09-26 Kopin Corporation Method of making light emitting diode bars and arrays
US5815126A (en) * 1993-10-22 1998-09-29 Kopin Corporation Monocular portable communication and display system
US6043800A (en) * 1990-12-31 2000-03-28 Kopin Corporation Head mounted liquid crystal display system
US6072445A (en) * 1990-12-31 2000-06-06 Kopin Corporation Head mounted color display system
US6424321B1 (en) 1993-10-22 2002-07-23 Kopin Corporation Head-mounted matrix display
US6448944B2 (en) 1993-10-22 2002-09-10 Kopin Corporation Head-mounted matrix display
US7310072B2 (en) 1993-10-22 2007-12-18 Kopin Corporation Portable communication display device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973080A (en) * 1972-09-25 1974-07-15
JPS5165888A (en) * 1974-10-29 1976-06-07 Xerox Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973080A (en) * 1972-09-25 1974-07-15
JPS5165888A (en) * 1974-10-29 1976-06-07 Xerox Corp

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072445A (en) * 1990-12-31 2000-06-06 Kopin Corporation Head mounted color display system
US7075501B1 (en) 1990-12-31 2006-07-11 Kopin Corporation Head mounted display system
US5583335A (en) * 1990-12-31 1996-12-10 Kopin Corporation Method of making an eye tracking system having an active matrix display
US6043800A (en) * 1990-12-31 2000-03-28 Kopin Corporation Head mounted liquid crystal display system
US5331149A (en) * 1990-12-31 1994-07-19 Kopin Corporation Eye tracking system having an array of photodetectors aligned respectively with an array of pixels
US5453405A (en) * 1991-01-18 1995-09-26 Kopin Corporation Method of making light emitting diode bars and arrays
US6140980A (en) * 1992-03-13 2000-10-31 Kopin Corporation Head-mounted display system
WO1993018428A3 (en) * 1992-03-13 1994-02-17 Kopin Corp Head-mounted display system
US6636185B1 (en) 1992-03-13 2003-10-21 Kopin Corporation Head-mounted display system
US5815126A (en) * 1993-10-22 1998-09-29 Kopin Corporation Monocular portable communication and display system
US6424321B1 (en) 1993-10-22 2002-07-23 Kopin Corporation Head-mounted matrix display
US6448944B2 (en) 1993-10-22 2002-09-10 Kopin Corporation Head-mounted matrix display
US7310072B2 (en) 1993-10-22 2007-12-18 Kopin Corporation Portable communication display device
US8040292B2 (en) 1993-10-22 2011-10-18 Kopin Corporation Portable communication display device

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