JPS547960B2 - - Google Patents
Info
- Publication number
- JPS547960B2 JPS547960B2 JP13405173A JP13405173A JPS547960B2 JP S547960 B2 JPS547960 B2 JP S547960B2 JP 13405173 A JP13405173 A JP 13405173A JP 13405173 A JP13405173 A JP 13405173A JP S547960 B2 JPS547960 B2 JP S547960B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13405173A JPS547960B2 (ja) | 1973-11-28 | 1973-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13405173A JPS547960B2 (ja) | 1973-11-28 | 1973-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5083798A JPS5083798A (ja) | 1975-07-07 |
| JPS547960B2 true JPS547960B2 (ja) | 1979-04-11 |
Family
ID=15119207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13405173A Expired JPS547960B2 (ja) | 1973-11-28 | 1973-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS547960B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4674363B2 (ja) * | 2005-06-27 | 2011-04-20 | 独立行政法人産業技術総合研究所 | 異常状態検出方法およびシート状圧電センサ |
| JP4736599B2 (ja) * | 2004-07-27 | 2011-07-27 | 独立行政法人産業技術総合研究所 | 圧電素子 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50148976U (ja) * | 1974-05-28 | 1975-12-10 | ||
| JPS55124282A (en) * | 1979-03-19 | 1980-09-25 | Matsushita Electric Ind Co Ltd | Method of fabricating piezoelectric acoustic converter |
| CN102037740B (zh) | 2008-05-29 | 2014-08-27 | 株式会社村田制作所 | 压电扬声器、扬声器装置以及触觉反馈装置 |
| JP5267559B2 (ja) | 2008-05-29 | 2013-08-21 | 株式会社村田製作所 | シート型振動体および音響機器 |
-
1973
- 1973-11-28 JP JP13405173A patent/JPS547960B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4736599B2 (ja) * | 2004-07-27 | 2011-07-27 | 独立行政法人産業技術総合研究所 | 圧電素子 |
| JP4674363B2 (ja) * | 2005-06-27 | 2011-04-20 | 独立行政法人産業技術総合研究所 | 異常状態検出方法およびシート状圧電センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5083798A (ja) | 1975-07-07 |