JPS547274A - Method of producing semiconductor surface oxide film - Google Patents
Method of producing semiconductor surface oxide filmInfo
- Publication number
- JPS547274A JPS547274A JP7309877A JP7309877A JPS547274A JP S547274 A JPS547274 A JP S547274A JP 7309877 A JP7309877 A JP 7309877A JP 7309877 A JP7309877 A JP 7309877A JP S547274 A JPS547274 A JP S547274A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- semiconductor surface
- surface oxide
- producing semiconductor
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7309877A JPS547274A (en) | 1977-06-20 | 1977-06-20 | Method of producing semiconductor surface oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7309877A JPS547274A (en) | 1977-06-20 | 1977-06-20 | Method of producing semiconductor surface oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS547274A true JPS547274A (en) | 1979-01-19 |
JPS5751972B2 JPS5751972B2 (en) | 1982-11-05 |
Family
ID=13508507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7309877A Granted JPS547274A (en) | 1977-06-20 | 1977-06-20 | Method of producing semiconductor surface oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS547274A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931032A (en) * | 1982-08-12 | 1984-02-18 | Mitsubishi Electric Corp | Plasma oxide film forming device |
JPS5934639A (en) * | 1982-08-21 | 1984-02-25 | Mitsubishi Electric Corp | Forming device for silicon nitride film |
JPH05243577A (en) * | 1992-02-26 | 1993-09-21 | Seiko Epson Corp | Manufacture of thin film transistor |
-
1977
- 1977-06-20 JP JP7309877A patent/JPS547274A/en active Granted
Non-Patent Citations (1)
Title |
---|
SOLID STATE TECHNOLOGY=1970 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931032A (en) * | 1982-08-12 | 1984-02-18 | Mitsubishi Electric Corp | Plasma oxide film forming device |
JPS5934639A (en) * | 1982-08-21 | 1984-02-25 | Mitsubishi Electric Corp | Forming device for silicon nitride film |
JPH05243577A (en) * | 1992-02-26 | 1993-09-21 | Seiko Epson Corp | Manufacture of thin film transistor |
Also Published As
Publication number | Publication date |
---|---|
JPS5751972B2 (en) | 1982-11-05 |
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