JPS5472669A - Impurity diffusing method of closing tube type - Google Patents
Impurity diffusing method of closing tube typeInfo
- Publication number
- JPS5472669A JPS5472669A JP14027077A JP14027077A JPS5472669A JP S5472669 A JPS5472669 A JP S5472669A JP 14027077 A JP14027077 A JP 14027077A JP 14027077 A JP14027077 A JP 14027077A JP S5472669 A JPS5472669 A JP S5472669A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- gaas
- layer
- tube type
- closing tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
Abstract
PURPOSE: To perform Zn diffusion of low concentration simply to the semiconductor substrat with the closed tube method, by taking the substrate providing Zn introducing layer as diffusion source.
CONSTITUTION: The GaAs substrate 10a forming the Zn diffusion layer 11 of high concentration on the entire surface, GaAs 12 and As13 providing the mask 6 of the insulation film are sealed in the ample 14 of quartz. Next, when it is processed at about 900°C higher than the formation of the diffusion layer 11, the layer 12 is the diffusion source, and the Zn vapor pressure in the ample is lowered than the case that Zn monomor or its compound is taken as the diffusion source and the low concentration Zn diffusion layer 15 of about 1x1013cm-3 can be formed on the GaAs 12. Further, the surface of GaAs 12 is not made coarsed by weighing As 13 as two atoms.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14027077A JPS5472669A (en) | 1977-11-22 | 1977-11-22 | Impurity diffusing method of closing tube type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14027077A JPS5472669A (en) | 1977-11-22 | 1977-11-22 | Impurity diffusing method of closing tube type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5472669A true JPS5472669A (en) | 1979-06-11 |
Family
ID=15264859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14027077A Pending JPS5472669A (en) | 1977-11-22 | 1977-11-22 | Impurity diffusing method of closing tube type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5472669A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5506186A (en) * | 1988-06-27 | 1996-04-09 | U.S. Philips Corporation | Method of manufacturing an optoelectronic device |
-
1977
- 1977-11-22 JP JP14027077A patent/JPS5472669A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5506186A (en) * | 1988-06-27 | 1996-04-09 | U.S. Philips Corporation | Method of manufacturing an optoelectronic device |
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