JPS5461473A - Etching tool - Google Patents
Etching toolInfo
- Publication number
- JPS5461473A JPS5461473A JP12750877A JP12750877A JPS5461473A JP S5461473 A JPS5461473 A JP S5461473A JP 12750877 A JP12750877 A JP 12750877A JP 12750877 A JP12750877 A JP 12750877A JP S5461473 A JPS5461473 A JP S5461473A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- wax
- tool
- wafer
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To enable flat etching, by increasing the thickness of the circumference part of plate shape tool, and by constituting the upper edge so that it has equal or slightly higher surface than the upper surface of wafer to be bonded.
CONSTITUTION: In the etching vessel 1 filled in the etching solution 2, the wafer 7 and the tool 8 sticked with wax 8 are fixed, and gas is bubbled in th etching vessel 1 through the perforated plate 5 from the gas inlet provided under the etching vessel 1. since the circumference of the tool has a thickness for barrier and no bubbling 4 is directly collided with the wax 8, no wax distortion can be made
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12750877A JPS5461473A (en) | 1977-10-26 | 1977-10-26 | Etching tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12750877A JPS5461473A (en) | 1977-10-26 | 1977-10-26 | Etching tool |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5461473A true JPS5461473A (en) | 1979-05-17 |
Family
ID=14961717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12750877A Pending JPS5461473A (en) | 1977-10-26 | 1977-10-26 | Etching tool |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5461473A (en) |
-
1977
- 1977-10-26 JP JP12750877A patent/JPS5461473A/en active Pending
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