JPS5460855A - Measurement device for deep level of semiconductor device - Google Patents

Measurement device for deep level of semiconductor device

Info

Publication number
JPS5460855A
JPS5460855A JP12802377A JP12802377A JPS5460855A JP S5460855 A JPS5460855 A JP S5460855A JP 12802377 A JP12802377 A JP 12802377A JP 12802377 A JP12802377 A JP 12802377A JP S5460855 A JPS5460855 A JP S5460855A
Authority
JP
Japan
Prior art keywords
circuit
sample
signal
holding
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12802377A
Other languages
Japanese (ja)
Other versions
JPS5731658B2 (en
Inventor
Toshio Uji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12802377A priority Critical patent/JPS5460855A/en
Publication of JPS5460855A publication Critical patent/JPS5460855A/en
Publication of JPS5731658B2 publication Critical patent/JPS5731658B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To obtain a small-sized and simple-structure measurement deivce by using two units of the sample holding element featuring the acquisition time which is shorter enough than the period of the periodic input signal and a sufficiently long holding time respectively.
CONSTITUTION: The periodic pulse voltage given from pulse voltage generator 21 is applied to measured semiconductor device test sample 20 to vary the junction capacity of sample 20. And the analog signal following the change of the junction capacity is applied to gate circuit 24 via capacitance meter 23. At the same time, circuit 24 is actuated by the control pulse signal sent from control pulse signal generator 22, and part of the analog signal is supplied to amplifier circuit 25 to be amplified. The amplified signals are then applied to independent sample holding circuit 26 and 27. In this case, the acquisition time and the holding time atteunation are reduced for circuit 26 and 27. After this, the signals are applied to differential amplifier 28 to cause the difference signal, and the recording is carried out via XY recording meter 30 while sweeping the temperature of sample 20
COPYRIGHT: (C)1979,JPO&Japio
JP12802377A 1977-10-24 1977-10-24 Measurement device for deep level of semiconductor device Granted JPS5460855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12802377A JPS5460855A (en) 1977-10-24 1977-10-24 Measurement device for deep level of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12802377A JPS5460855A (en) 1977-10-24 1977-10-24 Measurement device for deep level of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5460855A true JPS5460855A (en) 1979-05-16
JPS5731658B2 JPS5731658B2 (en) 1982-07-06

Family

ID=14974567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12802377A Granted JPS5460855A (en) 1977-10-24 1977-10-24 Measurement device for deep level of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5460855A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026446A (en) * 2015-07-22 2017-02-02 京セラ株式会社 Method for measuring current collapse

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225050A (en) * 1984-04-24 1985-11-09 Ngk Spark Plug Co Ltd Gas component detector

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURUAL OF APPLIED PHYICS=1974 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026446A (en) * 2015-07-22 2017-02-02 京セラ株式会社 Method for measuring current collapse

Also Published As

Publication number Publication date
JPS5731658B2 (en) 1982-07-06

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