JPS5459166A - Visual sensibility measuring apparatus of interferometer - Google Patents

Visual sensibility measuring apparatus of interferometer

Info

Publication number
JPS5459166A
JPS5459166A JP12696377A JP12696377A JPS5459166A JP S5459166 A JPS5459166 A JP S5459166A JP 12696377 A JP12696377 A JP 12696377A JP 12696377 A JP12696377 A JP 12696377A JP S5459166 A JPS5459166 A JP S5459166A
Authority
JP
Japan
Prior art keywords
circuit
frequency
interference fringe
reference pulse
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12696377A
Other languages
Japanese (ja)
Other versions
JPS5942819B2 (en
Inventor
Akira Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP12696377A priority Critical patent/JPS5942819B2/en
Publication of JPS5459166A publication Critical patent/JPS5459166A/en
Publication of JPS5942819B2 publication Critical patent/JPS5942819B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE: To achieve the improvement in measurement accuracy and reliability by controlling interference fringe scanning speeds and making the output frequency of a photoelectric transducer corresponding to the brightness and darkness of interference fringe constant.
CONSTITUTION: Laser light from a light source 1 forms an interference fringe by becoming two sets of rays which go through a beam splitter 3, reflecting mirror 6, reflecting mirror 8 provided on a movable base 8, etc. This inteference fringe is scanned by a turning mirror 12 and is detected by a photoelectric transducer 15, from which it is passed through a zero crossing detecting differentiation circuit 16 and a pulse generator 17, which in turn generates pulses at the maximum and minimum of the detection signal. These pulses are applied together with the reference pulse of a reference pulse generating circuit 19 to a difference frequency detection circuit 20. Hence, the scanning speed of the mirror 12 through the circuit 21 is controlled to a constant value according to the frequency of the reference pulse of the circuit 19 and the detection signal of the transducer 15 becomes a constant frequency. As a result, the measurement of high accuracy and high reliability free from the inclination and optical path difference of the beam spliiter 3, reflecting mirrors 6, 8 and the decrease owing to the change in background light may be per formed
COPYRIGHT: (C)1979,JPO&Japio
JP12696377A 1977-10-19 1977-10-19 Interferometer visibility measuring device Expired JPS5942819B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12696377A JPS5942819B2 (en) 1977-10-19 1977-10-19 Interferometer visibility measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12696377A JPS5942819B2 (en) 1977-10-19 1977-10-19 Interferometer visibility measuring device

Publications (2)

Publication Number Publication Date
JPS5459166A true JPS5459166A (en) 1979-05-12
JPS5942819B2 JPS5942819B2 (en) 1984-10-17

Family

ID=14948221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12696377A Expired JPS5942819B2 (en) 1977-10-19 1977-10-19 Interferometer visibility measuring device

Country Status (1)

Country Link
JP (1) JPS5942819B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872756A (en) * 1985-10-17 1989-10-10 Pilkington Brothers Plc Dual path interferometer with varying difference in path length
JP2015504167A (en) * 2012-01-17 2015-02-05 フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Apparatus and method for optical inspection of samples

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3558189B1 (en) 2016-12-20 2021-06-23 The Procter & Gamble Company Methods and apparatuses for making elastomeric laminates with elastic strands provided with a spin finish
US11147718B2 (en) 2017-09-01 2021-10-19 The Procter & Gamble Company Beamed elastomeric laminate structure, fit, and texture
US11547613B2 (en) 2017-12-05 2023-01-10 The Procter & Gamble Company Stretch laminate with beamed elastics and formed nonwoven layer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872756A (en) * 1985-10-17 1989-10-10 Pilkington Brothers Plc Dual path interferometer with varying difference in path length
EP0449335A2 (en) * 1985-10-17 1991-10-02 Pilkington Plc Interferometer
JP2015504167A (en) * 2012-01-17 2015-02-05 フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Apparatus and method for optical inspection of samples

Also Published As

Publication number Publication date
JPS5942819B2 (en) 1984-10-17

Similar Documents

Publication Publication Date Title
US4634879A (en) Method and system for determining surface profile information
JPS5449147A (en) Recorder
GB1493967A (en) Method of and apparatus for measuring the width of an elongated element
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
JPS5459166A (en) Visual sensibility measuring apparatus of interferometer
JPH059723B2 (en)
US3632215A (en) Apparatus for determining the position coordinates of a point relative to a reference point
JPS55154402A (en) Shape measuring apparatus
SU1404810A1 (en) Unequal-arm laser interferometer
SU1681168A1 (en) Instrument to measure the object displacement
JPS55117946A (en) Flaw detection method of hollow shaft inside surface
JPS5733306A (en) Surface roughness measuring device
SU1726982A1 (en) Method of measuring diameters and interaxle distance of holes
SU1357701A1 (en) Diffraction method of measuring linear dimensions of article and device for effecting same
JPS6466503A (en) Surface displacement measuring apparatus
Hart A laser-source photo-electric microscope for sensing moving scale lines
SU739346A1 (en) Device for measuring vibration parameters
SU393789A1 (en) METHOD OF MEASUREMENT OF CONSUMPTION OF A RAY OF OPTICAL QUANTUM GENERATOR
SU909637A1 (en) Device for interferometric measuring of surface displacement high speeds
SU1755050A1 (en) Method of measuring surface relief
SU659895A1 (en) Article checking device
JPS55124002A (en) Optical position detector
SU1210098A1 (en) Arrangement for measuring object movement speed
SU1670405A1 (en) Interference method of location of objects
SU1054680A1 (en) Method of gauging linear dimensions of opaque objects