JPS5458700A - Production of alpha-type silicon nitride - Google Patents

Production of alpha-type silicon nitride

Info

Publication number
JPS5458700A
JPS5458700A JP12525677A JP12525677A JPS5458700A JP S5458700 A JPS5458700 A JP S5458700A JP 12525677 A JP12525677 A JP 12525677A JP 12525677 A JP12525677 A JP 12525677A JP S5458700 A JPS5458700 A JP S5458700A
Authority
JP
Japan
Prior art keywords
powder
nitriding
silicon nitride
type silicon
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12525677A
Other languages
Japanese (ja)
Inventor
Masami Wada
Hiroichi Shimomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JNC Corp
Original Assignee
Chisso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chisso Corp filed Critical Chisso Corp
Priority to JP12525677A priority Critical patent/JPS5458700A/en
Publication of JPS5458700A publication Critical patent/JPS5458700A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE: To produce Si3N4 of high α-type content in a short time by mixing Si powder with a small amt. of PdO powder and heating the mixt. to a specific temp. in a nitriding gas atmosphere.
CONSTITUTION: 99.5W94 pts. wt. of Si powder with a purity above 98% and a grain size of 5-15μ are uniformly mixed with 0.5W6 pts. wt. of PdO powder with agrain size equal to or smaller than the above one. The mixt. is then heated to 1350W1500°C in a nitriding gas atmosphere contg. N2 gas, NH3 gas, etc. to carry out nitriding reaction. Inert gases such as He and Ar may be contained in the stmosphere. The time necessary for the reaction can be varied suitably by selecting the compsn. of the raw material powder and the nitriding temp., yet high purity α-type silicon nitride whose α-type Si3N4 content is more than 85% can be obtd. in a short time
COPYRIGHT: (C)1979,JPO&Japio
JP12525677A 1977-10-19 1977-10-19 Production of alpha-type silicon nitride Pending JPS5458700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12525677A JPS5458700A (en) 1977-10-19 1977-10-19 Production of alpha-type silicon nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12525677A JPS5458700A (en) 1977-10-19 1977-10-19 Production of alpha-type silicon nitride

Publications (1)

Publication Number Publication Date
JPS5458700A true JPS5458700A (en) 1979-05-11

Family

ID=14905591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12525677A Pending JPS5458700A (en) 1977-10-19 1977-10-19 Production of alpha-type silicon nitride

Country Status (1)

Country Link
JP (1) JPS5458700A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0628514A1 (en) * 1993-06-11 1994-12-14 Shin-Etsu Chemical Co., Ltd. Preparation of high alpha-type silicon nitride powder
CN106395769A (en) * 2016-08-26 2017-02-15 河北高富氮化硅材料有限公司 Method for preparing high purity high alpha phase silicon nitride powder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0628514A1 (en) * 1993-06-11 1994-12-14 Shin-Etsu Chemical Co., Ltd. Preparation of high alpha-type silicon nitride powder
CN106395769A (en) * 2016-08-26 2017-02-15 河北高富氮化硅材料有限公司 Method for preparing high purity high alpha phase silicon nitride powder

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