JPS5452582A - Ion gauge for very high vacuum - Google Patents
Ion gauge for very high vacuumInfo
- Publication number
- JPS5452582A JPS5452582A JP11876077A JP11876077A JPS5452582A JP S5452582 A JPS5452582 A JP S5452582A JP 11876077 A JP11876077 A JP 11876077A JP 11876077 A JP11876077 A JP 11876077A JP S5452582 A JPS5452582 A JP S5452582A
- Authority
- JP
- Japan
- Prior art keywords
- high vacuum
- ion gauge
- gauge
- ion
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11876077A JPS5452582A (en) | 1977-10-03 | 1977-10-03 | Ion gauge for very high vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11876077A JPS5452582A (en) | 1977-10-03 | 1977-10-03 | Ion gauge for very high vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5452582A true JPS5452582A (en) | 1979-04-25 |
Family
ID=14744371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11876077A Pending JPS5452582A (en) | 1977-10-03 | 1977-10-03 | Ion gauge for very high vacuum |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5452582A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57134855A (en) * | 1981-02-13 | 1982-08-20 | Anelva Corp | Ionization vacuum gauge |
JPH04123206U (en) * | 1991-04-12 | 1992-11-06 | 株式会社エツクス | Changing clothes |
-
1977
- 1977-10-03 JP JP11876077A patent/JPS5452582A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57134855A (en) * | 1981-02-13 | 1982-08-20 | Anelva Corp | Ionization vacuum gauge |
JPH0251209B2 (en) * | 1981-02-13 | 1990-11-06 | Anelva Corp | |
JPH04123206U (en) * | 1991-04-12 | 1992-11-06 | 株式会社エツクス | Changing clothes |
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