JPS5452582A - Ion gauge for very high vacuum - Google Patents

Ion gauge for very high vacuum

Info

Publication number
JPS5452582A
JPS5452582A JP11876077A JP11876077A JPS5452582A JP S5452582 A JPS5452582 A JP S5452582A JP 11876077 A JP11876077 A JP 11876077A JP 11876077 A JP11876077 A JP 11876077A JP S5452582 A JPS5452582 A JP S5452582A
Authority
JP
Japan
Prior art keywords
high vacuum
ion gauge
gauge
ion
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11876077A
Other languages
Japanese (ja)
Inventor
Futoshi Kanematsu
Yasuo Fujii
Kouji Mima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jasco Corp
Original Assignee
Nihon Bunko Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Bunko Kogyo KK filed Critical Nihon Bunko Kogyo KK
Priority to JP11876077A priority Critical patent/JPS5452582A/en
Publication of JPS5452582A publication Critical patent/JPS5452582A/en
Pending legal-status Critical Current

Links

JP11876077A 1977-10-03 1977-10-03 Ion gauge for very high vacuum Pending JPS5452582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11876077A JPS5452582A (en) 1977-10-03 1977-10-03 Ion gauge for very high vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11876077A JPS5452582A (en) 1977-10-03 1977-10-03 Ion gauge for very high vacuum

Publications (1)

Publication Number Publication Date
JPS5452582A true JPS5452582A (en) 1979-04-25

Family

ID=14744371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11876077A Pending JPS5452582A (en) 1977-10-03 1977-10-03 Ion gauge for very high vacuum

Country Status (1)

Country Link
JP (1) JPS5452582A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134855A (en) * 1981-02-13 1982-08-20 Anelva Corp Ionization vacuum gauge
JPH04123206U (en) * 1991-04-12 1992-11-06 株式会社エツクス Changing clothes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134855A (en) * 1981-02-13 1982-08-20 Anelva Corp Ionization vacuum gauge
JPH0251209B2 (en) * 1981-02-13 1990-11-06 Anelva Corp
JPH04123206U (en) * 1991-04-12 1992-11-06 株式会社エツクス Changing clothes

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