JPS5451589A - Slit device in mass spectrometer - Google Patents
Slit device in mass spectrometerInfo
- Publication number
- JPS5451589A JPS5451589A JP11673677A JP11673677A JPS5451589A JP S5451589 A JPS5451589 A JP S5451589A JP 11673677 A JP11673677 A JP 11673677A JP 11673677 A JP11673677 A JP 11673677A JP S5451589 A JPS5451589 A JP S5451589A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- resolving power
- knife
- width
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: To present variable slit width device without axial deviation resistant to contamination, by placing a fixed slit with wide slit width for low resolving power and a slit of continuously variable slit width for high resolving power on the same center line.
CONSTITUTION: When the resolving power is as low as 1000, a slit knife 36 is opened fully as shown in sketch (A), and a fixed slit 50 formed on the base is used for the analysis. The position of slit 50 may be slightly offset from the ion optical convergence point, but it does not matter in the low resolving power mode. On the other hand, when the resolving power is as high as 10000, the gap of knife 36 is made narrower than the width of slit 50 as shwon in sketch (B), and the slit formed by the knife 36 is used for the measurement. Only in the case of high resolving power mode, the gap of slit knife is narrowed, so that the contamination of the slit knife for high resolving power may be prevented. Hence, the wide fixed slit for low resolving power and the variable width slit for high resolving power, provided on the same center line, may be used selectively according to the resolving power required
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11673677A JPS5451589A (en) | 1977-09-30 | 1977-09-30 | Slit device in mass spectrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11673677A JPS5451589A (en) | 1977-09-30 | 1977-09-30 | Slit device in mass spectrometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5451589A true JPS5451589A (en) | 1979-04-23 |
JPS6112544B2 JPS6112544B2 (en) | 1986-04-09 |
Family
ID=14694506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11673677A Granted JPS5451589A (en) | 1977-09-30 | 1977-09-30 | Slit device in mass spectrometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5451589A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03138850A (en) * | 1989-10-23 | 1991-06-13 | Hitachi Ltd | Secondary ion mass spectrograph |
WO2007114120A1 (en) * | 2006-03-31 | 2007-10-11 | Ihi Corporation | Ion implanter |
JP2020071907A (en) * | 2018-10-29 | 2020-05-07 | 三菱電機株式会社 | Ion implantation device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0546869U (en) * | 1991-12-05 | 1993-06-22 | 川崎重工業株式会社 | Steel plate suction attracting device |
-
1977
- 1977-09-30 JP JP11673677A patent/JPS5451589A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03138850A (en) * | 1989-10-23 | 1991-06-13 | Hitachi Ltd | Secondary ion mass spectrograph |
WO2007114120A1 (en) * | 2006-03-31 | 2007-10-11 | Ihi Corporation | Ion implanter |
JP2007273368A (en) * | 2006-03-31 | 2007-10-18 | Ihi Corp | Ion implantation device |
US7964856B2 (en) | 2006-03-31 | 2011-06-21 | Ihi Corporation | Ion implanting apparatus |
JP2020071907A (en) * | 2018-10-29 | 2020-05-07 | 三菱電機株式会社 | Ion implantation device |
Also Published As
Publication number | Publication date |
---|---|
JPS6112544B2 (en) | 1986-04-09 |
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