JPS544570A - Production of semiconductor devices - Google Patents
Production of semiconductor devicesInfo
- Publication number
- JPS544570A JPS544570A JP7013577A JP7013577A JPS544570A JP S544570 A JPS544570 A JP S544570A JP 7013577 A JP7013577 A JP 7013577A JP 7013577 A JP7013577 A JP 7013577A JP S544570 A JPS544570 A JP S544570A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor devices
- spacing
- positive
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To make fine patterns with easy by using the spacing of positive and opposite mask patterns formed on a substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7013577A JPS544570A (en) | 1977-06-13 | 1977-06-13 | Production of semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7013577A JPS544570A (en) | 1977-06-13 | 1977-06-13 | Production of semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544570A true JPS544570A (en) | 1979-01-13 |
Family
ID=13422810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7013577A Pending JPS544570A (en) | 1977-06-13 | 1977-06-13 | Production of semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544570A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145274A (en) * | 1975-05-27 | 1976-12-14 | Fairchild Camera Instr Co | Method of manufacturing semiconductor element and structure of semiconductor used in that method |
-
1977
- 1977-06-13 JP JP7013577A patent/JPS544570A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145274A (en) * | 1975-05-27 | 1976-12-14 | Fairchild Camera Instr Co | Method of manufacturing semiconductor element and structure of semiconductor used in that method |
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