JPS544400A - Piezoelectric crystal film of zinc oxide - Google Patents

Piezoelectric crystal film of zinc oxide

Info

Publication number
JPS544400A
JPS544400A JP7015177A JP7015177A JPS544400A JP S544400 A JPS544400 A JP S544400A JP 7015177 A JP7015177 A JP 7015177A JP 7015177 A JP7015177 A JP 7015177A JP S544400 A JPS544400 A JP S544400A
Authority
JP
Japan
Prior art keywords
zinc oxide
crystal film
piezoelectric crystal
piezoelectric
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7015177A
Other languages
Japanese (ja)
Other versions
JPS5746230B2 (en
Inventor
Toshio Ogawa
Kouji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7015177A priority Critical patent/JPS544400A/en
Priority to DE19782825083 priority patent/DE2825083A1/en
Priority to US05/913,803 priority patent/US4182793A/en
Publication of JPS544400A publication Critical patent/JPS544400A/en
Publication of JPS5746230B2 publication Critical patent/JPS5746230B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7015177A 1977-06-09 1977-06-13 Piezoelectric crystal film of zinc oxide Granted JPS544400A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP7015177A JPS544400A (en) 1977-06-13 1977-06-13 Piezoelectric crystal film of zinc oxide
DE19782825083 DE2825083A1 (en) 1977-06-09 1978-06-08 PIEZOELECTRIC CRYSTALLINE FILM
US05/913,803 US4182793A (en) 1977-06-09 1978-06-08 Piezoelectric crystalline film of zinc oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7015177A JPS544400A (en) 1977-06-13 1977-06-13 Piezoelectric crystal film of zinc oxide

Publications (2)

Publication Number Publication Date
JPS544400A true JPS544400A (en) 1979-01-13
JPS5746230B2 JPS5746230B2 (en) 1982-10-01

Family

ID=13423283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7015177A Granted JPS544400A (en) 1977-06-09 1977-06-13 Piezoelectric crystal film of zinc oxide

Country Status (1)

Country Link
JP (1) JPS544400A (en)

Also Published As

Publication number Publication date
JPS5746230B2 (en) 1982-10-01

Similar Documents

Publication Publication Date Title
JPS5494479A (en) Manufacture of epitaxial single crystal thin film
JPS5492176A (en) Thin film structure
JPS52126476A (en) Adjusting of platness of thermplastic film
JPS5425497A (en) Piezoelectric crystal film of zinc oxide
JPS5396494A (en) Piezooelectric crystal film of zinc oxide
JPS5445796A (en) Piezooelectric crystalline membrane of zinc oxide
JPS543297A (en) Piezoelectric crystal film of zinc oxide
JPS5396495A (en) Piezooelectric crystal film of zinc oxide
JPS5470335A (en) Preparation of linear transsquinacridone gammaamodified crystal
JPS5443598A (en) Piezooelectric crystalline membrane of zinc oxide
JPS5429100A (en) Piezoelectric crystal film of zinc oxide
JPS5429099A (en) Piezoelectric crystal film of zinc oxide
JPS53118798A (en) Piezooelectric crystal film of zinc oxide
JPS544399A (en) Piezoelectric crystal film of zinc oxide
JPS544400A (en) Piezoelectric crystal film of zinc oxide
JPS53114099A (en) Piezooelectric crystal film of zinc oxide
JPS53114098A (en) Piezooelectric crystal film of zinc oxide
JPS5396496A (en) Piezooelectric crystal film of zinc oxide
JPS5392498A (en) Piezooelectric crystal film of zinc oxide
JPS543296A (en) Piezoelectric crystal layer of zinc oxide
JPS54129896A (en) Piezooelectric thin film blind electrode elastic surface wave converter
JPS5459763A (en) Device of taking out film
JPS5425692A (en) Thin film structure
JPS53142389A (en) Method of forming zinc oxide film
JPS5443599A (en) Piezooelectric crystalline membrane of zinc oxide