JPS5441079A - Device for inspecting semiconductor - Google Patents
Device for inspecting semiconductorInfo
- Publication number
- JPS5441079A JPS5441079A JP10807777A JP10807777A JPS5441079A JP S5441079 A JPS5441079 A JP S5441079A JP 10807777 A JP10807777 A JP 10807777A JP 10807777 A JP10807777 A JP 10807777A JP S5441079 A JPS5441079 A JP S5441079A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting semiconductor
- inspecting
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10807777A JPS5441079A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
US05/928,711 US4219110A (en) | 1977-09-08 | 1978-07-27 | Wafer probe apparatus with pneumatic wafer orienting mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10807777A JPS5441079A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5441079A true JPS5441079A (en) | 1979-03-31 |
Family
ID=14475281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10807777A Pending JPS5441079A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5441079A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869396U (en) * | 1981-11-05 | 1983-05-11 | 日本電気株式会社 | Magnetic disk module inspection equipment |
JPS592135U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | wafer rotation device |
JPS6187352A (en) * | 1985-09-27 | 1986-05-02 | Hitachi Ltd | Positioning device for orientation flat |
JPS63241948A (en) * | 1987-03-30 | 1988-10-07 | Hitachi Ltd | Wafer transfer device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984791A (en) * | 1972-12-22 | 1974-08-14 | ||
JPS5136076A (en) * | 1974-09-21 | 1976-03-26 | Mitsubishi Electric Corp | SHIRYOTORIA TSUKAISOCHI |
-
1977
- 1977-09-08 JP JP10807777A patent/JPS5441079A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984791A (en) * | 1972-12-22 | 1974-08-14 | ||
JPS5136076A (en) * | 1974-09-21 | 1976-03-26 | Mitsubishi Electric Corp | SHIRYOTORIA TSUKAISOCHI |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869396U (en) * | 1981-11-05 | 1983-05-11 | 日本電気株式会社 | Magnetic disk module inspection equipment |
JPS592135U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | wafer rotation device |
JPS626690Y2 (en) * | 1982-06-28 | 1987-02-16 | ||
JPS6187352A (en) * | 1985-09-27 | 1986-05-02 | Hitachi Ltd | Positioning device for orientation flat |
JPS63241948A (en) * | 1987-03-30 | 1988-10-07 | Hitachi Ltd | Wafer transfer device |
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