JPS543594A - Solid surface element analyzer - Google Patents
Solid surface element analyzerInfo
- Publication number
- JPS543594A JPS543594A JP6789877A JP6789877A JPS543594A JP S543594 A JPS543594 A JP S543594A JP 6789877 A JP6789877 A JP 6789877A JP 6789877 A JP6789877 A JP 6789877A JP S543594 A JPS543594 A JP S543594A
- Authority
- JP
- Japan
- Prior art keywords
- solid surface
- surface element
- element analyzer
- analyzer
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To enable surface analysis of specimen by charge beam radiation to be performed with high sensitivity by lowering the solid surface by a circulating type cooling system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6789877A JPS543594A (en) | 1977-06-10 | 1977-06-10 | Solid surface element analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6789877A JPS543594A (en) | 1977-06-10 | 1977-06-10 | Solid surface element analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS543594A true JPS543594A (en) | 1979-01-11 |
Family
ID=13358166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6789877A Pending JPS543594A (en) | 1977-06-10 | 1977-06-10 | Solid surface element analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543594A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5759354U (en) * | 1980-09-26 | 1982-04-08 | ||
WO2015041267A1 (en) * | 2013-09-20 | 2015-03-26 | 株式会社日立ハイテクノロジーズ | Anti-contamination trap, and vacuum application device |
-
1977
- 1977-06-10 JP JP6789877A patent/JPS543594A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5759354U (en) * | 1980-09-26 | 1982-04-08 | ||
WO2015041267A1 (en) * | 2013-09-20 | 2015-03-26 | 株式会社日立ハイテクノロジーズ | Anti-contamination trap, and vacuum application device |
JPWO2015041267A1 (en) * | 2013-09-20 | 2017-03-02 | 株式会社日立ハイテクノロジーズ | Anti-contamination trap and vacuum application equipment |
US10269533B2 (en) | 2013-09-20 | 2019-04-23 | Hitachi High-Technologies Corporation | Anti-contamination trap, and vacuum application device |
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