JPS542983A - Preparation of tool covered with hard substance - Google Patents

Preparation of tool covered with hard substance

Info

Publication number
JPS542983A
JPS542983A JP6813777A JP6813777A JPS542983A JP S542983 A JPS542983 A JP S542983A JP 6813777 A JP6813777 A JP 6813777A JP 6813777 A JP6813777 A JP 6813777A JP S542983 A JPS542983 A JP S542983A
Authority
JP
Japan
Prior art keywords
hard substance
preparation
tool
tool covered
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6813777A
Other languages
Japanese (ja)
Inventor
Yoichi Murayama
Mitsunori Kobayashi
Yoshihiko Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP6813777A priority Critical patent/JPS542983A/en
Publication of JPS542983A publication Critical patent/JPS542983A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain the tool covered with a hard substance having excellent wear resistance and long life, by heating and evaporating a metal of the IV a group, ionizing it in the area of high-frequency glow discharge and ion-plating on the tool in the atmosphere of ionizing gas having high vacuum such as carbonizing gas, etc.
JP6813777A 1977-06-09 1977-06-09 Preparation of tool covered with hard substance Pending JPS542983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6813777A JPS542983A (en) 1977-06-09 1977-06-09 Preparation of tool covered with hard substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6813777A JPS542983A (en) 1977-06-09 1977-06-09 Preparation of tool covered with hard substance

Publications (1)

Publication Number Publication Date
JPS542983A true JPS542983A (en) 1979-01-10

Family

ID=13365051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6813777A Pending JPS542983A (en) 1977-06-09 1977-06-09 Preparation of tool covered with hard substance

Country Status (1)

Country Link
JP (1) JPS542983A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161058A (en) * 1981-03-30 1982-10-04 Agency Of Ind Science & Technol Production of hard film
JPS5981002A (en) * 1982-10-28 1984-05-10 San Alloy Kogyo Kk Coating tool and its manufacturing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161058A (en) * 1981-03-30 1982-10-04 Agency Of Ind Science & Technol Production of hard film
JPS5928629B2 (en) * 1981-03-30 1984-07-14 工業技術院長 Hard coating manufacturing method
JPS5981002A (en) * 1982-10-28 1984-05-10 San Alloy Kogyo Kk Coating tool and its manufacturing method
JPH0235027B2 (en) * 1982-10-28 1990-08-08 San Aroi Kogyo Kk

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