JPS5422778A - Plasma current transfer device - Google Patents
Plasma current transfer deviceInfo
- Publication number
- JPS5422778A JPS5422778A JP8739177A JP8739177A JPS5422778A JP S5422778 A JPS5422778 A JP S5422778A JP 8739177 A JP8739177 A JP 8739177A JP 8739177 A JP8739177 A JP 8739177A JP S5422778 A JPS5422778 A JP S5422778A
- Authority
- JP
- Japan
- Prior art keywords
- current transfer
- plasma current
- transfer device
- magnetic field
- attaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To increase the magnetic field intensity and then to change the magnetic field distribution by attaching the iron or a high-permeability material to both the tip and the terminal of the coaxial electromagnet groups used for the plasma current transfer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8739177A JPS5422778A (en) | 1977-07-22 | 1977-07-22 | Plasma current transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8739177A JPS5422778A (en) | 1977-07-22 | 1977-07-22 | Plasma current transfer device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP556084A Division JPS59161035A (en) | 1984-01-18 | 1984-01-18 | Plasma generator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5422778A true JPS5422778A (en) | 1979-02-20 |
Family
ID=13913577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8739177A Pending JPS5422778A (en) | 1977-07-22 | 1977-07-22 | Plasma current transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5422778A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4609428A (en) * | 1984-07-23 | 1986-09-02 | Fujitsu Limited | Method and apparatus for microwave plasma anisotropic dry etching |
-
1977
- 1977-07-22 JP JP8739177A patent/JPS5422778A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4609428A (en) * | 1984-07-23 | 1986-09-02 | Fujitsu Limited | Method and apparatus for microwave plasma anisotropic dry etching |
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