JPS5422778A - Plasma current transfer device - Google Patents

Plasma current transfer device

Info

Publication number
JPS5422778A
JPS5422778A JP8739177A JP8739177A JPS5422778A JP S5422778 A JPS5422778 A JP S5422778A JP 8739177 A JP8739177 A JP 8739177A JP 8739177 A JP8739177 A JP 8739177A JP S5422778 A JPS5422778 A JP S5422778A
Authority
JP
Japan
Prior art keywords
current transfer
plasma current
transfer device
magnetic field
attaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8739177A
Other languages
Japanese (ja)
Inventor
Takashi Tsuchimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8739177A priority Critical patent/JPS5422778A/en
Publication of JPS5422778A publication Critical patent/JPS5422778A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To increase the magnetic field intensity and then to change the magnetic field distribution by attaching the iron or a high-permeability material to both the tip and the terminal of the coaxial electromagnet groups used for the plasma current transfer.
COPYRIGHT: (C)1979,JPO&Japio
JP8739177A 1977-07-22 1977-07-22 Plasma current transfer device Pending JPS5422778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8739177A JPS5422778A (en) 1977-07-22 1977-07-22 Plasma current transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8739177A JPS5422778A (en) 1977-07-22 1977-07-22 Plasma current transfer device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP556084A Division JPS59161035A (en) 1984-01-18 1984-01-18 Plasma generator

Publications (1)

Publication Number Publication Date
JPS5422778A true JPS5422778A (en) 1979-02-20

Family

ID=13913577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8739177A Pending JPS5422778A (en) 1977-07-22 1977-07-22 Plasma current transfer device

Country Status (1)

Country Link
JP (1) JPS5422778A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609428A (en) * 1984-07-23 1986-09-02 Fujitsu Limited Method and apparatus for microwave plasma anisotropic dry etching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609428A (en) * 1984-07-23 1986-09-02 Fujitsu Limited Method and apparatus for microwave plasma anisotropic dry etching

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