JPS5421267A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5421267A JPS5421267A JP8681877A JP8681877A JPS5421267A JP S5421267 A JPS5421267 A JP S5421267A JP 8681877 A JP8681877 A JP 8681877A JP 8681877 A JP8681877 A JP 8681877A JP S5421267 A JPS5421267 A JP S5421267A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- manufacture
- semiconductor device
- groove
- grovove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To surely protect the PN jucntion with sufficient thickness for the grovove side surface grooves, by exposing the side surface of the PN junction with the composite grooves consisting of the first groove and the second groove having wider width and shallow depth than the first one and by covering the side surface of the grooves with passivation film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8681877A JPS5421267A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8681877A JPS5421267A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5421267A true JPS5421267A (en) | 1979-02-17 |
Family
ID=13897375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8681877A Pending JPS5421267A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421267A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5181687U (en) * | 1974-12-24 | 1976-06-30 |
-
1977
- 1977-07-19 JP JP8681877A patent/JPS5421267A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5181687U (en) * | 1974-12-24 | 1976-06-30 |
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