JPS5421267A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5421267A
JPS5421267A JP8681877A JP8681877A JPS5421267A JP S5421267 A JPS5421267 A JP S5421267A JP 8681877 A JP8681877 A JP 8681877A JP 8681877 A JP8681877 A JP 8681877A JP S5421267 A JPS5421267 A JP S5421267A
Authority
JP
Japan
Prior art keywords
grooves
manufacture
semiconductor device
groove
grovove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8681877A
Other languages
Japanese (ja)
Inventor
Ichiro Kume
Takeshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8681877A priority Critical patent/JPS5421267A/en
Publication of JPS5421267A publication Critical patent/JPS5421267A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To surely protect the PN jucntion with sufficient thickness for the grovove side surface grooves, by exposing the side surface of the PN junction with the composite grooves consisting of the first groove and the second groove having wider width and shallow depth than the first one and by covering the side surface of the grooves with passivation film.
COPYRIGHT: (C)1979,JPO&Japio
JP8681877A 1977-07-19 1977-07-19 Manufacture for semiconductor device Pending JPS5421267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8681877A JPS5421267A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8681877A JPS5421267A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5421267A true JPS5421267A (en) 1979-02-17

Family

ID=13897375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8681877A Pending JPS5421267A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5421267A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181687U (en) * 1974-12-24 1976-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181687U (en) * 1974-12-24 1976-06-30

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