JPS5420663A - Grinding method of semiconductor wafers - Google Patents
Grinding method of semiconductor wafersInfo
- Publication number
- JPS5420663A JPS5420663A JP8514177A JP8514177A JPS5420663A JP S5420663 A JPS5420663 A JP S5420663A JP 8514177 A JP8514177 A JP 8514177A JP 8514177 A JP8514177 A JP 8514177A JP S5420663 A JPS5420663 A JP S5420663A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- semiconductor wafers
- grinding method
- grinding wheel
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
PURPOSE: To efficiently perform the end face grinding of wafers by holding the wafers in such a manner that they do not detach from a grinding wheel with varying diameters of the grinding wheel making contact to the end faces of the wafers during rotating of the grinding wheel thereby performing beveling of curved faces.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8514177A JPS5420663A (en) | 1977-07-18 | 1977-07-18 | Grinding method of semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8514177A JPS5420663A (en) | 1977-07-18 | 1977-07-18 | Grinding method of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5420663A true JPS5420663A (en) | 1979-02-16 |
Family
ID=13850373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8514177A Pending JPS5420663A (en) | 1977-07-18 | 1977-07-18 | Grinding method of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5420663A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113332A (en) * | 1979-02-23 | 1980-09-01 | Hitachi Ltd | Manufacture of wafer |
-
1977
- 1977-07-18 JP JP8514177A patent/JPS5420663A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113332A (en) * | 1979-02-23 | 1980-09-01 | Hitachi Ltd | Manufacture of wafer |
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