JPS5420586A - Air bearing - Google Patents

Air bearing

Info

Publication number
JPS5420586A
JPS5420586A JP8427277A JP8427277A JPS5420586A JP S5420586 A JPS5420586 A JP S5420586A JP 8427277 A JP8427277 A JP 8427277A JP 8427277 A JP8427277 A JP 8427277A JP S5420586 A JPS5420586 A JP S5420586A
Authority
JP
Japan
Prior art keywords
air bearing
injection rows
rows
convey
conveyed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8427277A
Other languages
Japanese (ja)
Inventor
Masaki Tsukagoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8427277A priority Critical patent/JPS5420586A/en
Publication of JPS5420586A publication Critical patent/JPS5420586A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE: To convey an article to be conveyed in no contact state by providing correcting injection rows in parallel with gas injection rows.
COPYRIGHT: (C)1979,JPO&Japio
JP8427277A 1977-07-15 1977-07-15 Air bearing Pending JPS5420586A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8427277A JPS5420586A (en) 1977-07-15 1977-07-15 Air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8427277A JPS5420586A (en) 1977-07-15 1977-07-15 Air bearing

Publications (1)

Publication Number Publication Date
JPS5420586A true JPS5420586A (en) 1979-02-16

Family

ID=13825810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8427277A Pending JPS5420586A (en) 1977-07-15 1977-07-15 Air bearing

Country Status (1)

Country Link
JP (1) JPS5420586A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4738748A (en) * 1983-09-30 1988-04-19 Fujitsu Limited Plasma processor and method for IC fabrication
US6045319A (en) * 1997-08-11 2000-04-04 Murata Kikai Kabushiki Kaisha Carrier transport device
JP2005298101A (en) * 2004-04-08 2005-10-27 Mitsubishi Materials Corp Plate for conveying device, and conveying device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4738748A (en) * 1983-09-30 1988-04-19 Fujitsu Limited Plasma processor and method for IC fabrication
US6045319A (en) * 1997-08-11 2000-04-04 Murata Kikai Kabushiki Kaisha Carrier transport device
JP2005298101A (en) * 2004-04-08 2005-10-27 Mitsubishi Materials Corp Plate for conveying device, and conveying device
JP4526854B2 (en) * 2004-04-08 2010-08-18 ユニバーサル製缶株式会社 Transport device plate and transport device

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