JPS5420586A - Air bearing - Google Patents
Air bearingInfo
- Publication number
- JPS5420586A JPS5420586A JP8427277A JP8427277A JPS5420586A JP S5420586 A JPS5420586 A JP S5420586A JP 8427277 A JP8427277 A JP 8427277A JP 8427277 A JP8427277 A JP 8427277A JP S5420586 A JPS5420586 A JP S5420586A
- Authority
- JP
- Japan
- Prior art keywords
- air bearing
- injection rows
- rows
- convey
- conveyed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
PURPOSE: To convey an article to be conveyed in no contact state by providing correcting injection rows in parallel with gas injection rows.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8427277A JPS5420586A (en) | 1977-07-15 | 1977-07-15 | Air bearing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8427277A JPS5420586A (en) | 1977-07-15 | 1977-07-15 | Air bearing |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5420586A true JPS5420586A (en) | 1979-02-16 |
Family
ID=13825810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8427277A Pending JPS5420586A (en) | 1977-07-15 | 1977-07-15 | Air bearing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5420586A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4738748A (en) * | 1983-09-30 | 1988-04-19 | Fujitsu Limited | Plasma processor and method for IC fabrication |
US6045319A (en) * | 1997-08-11 | 2000-04-04 | Murata Kikai Kabushiki Kaisha | Carrier transport device |
JP2005298101A (en) * | 2004-04-08 | 2005-10-27 | Mitsubishi Materials Corp | Plate for conveying device, and conveying device |
-
1977
- 1977-07-15 JP JP8427277A patent/JPS5420586A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4738748A (en) * | 1983-09-30 | 1988-04-19 | Fujitsu Limited | Plasma processor and method for IC fabrication |
US6045319A (en) * | 1997-08-11 | 2000-04-04 | Murata Kikai Kabushiki Kaisha | Carrier transport device |
JP2005298101A (en) * | 2004-04-08 | 2005-10-27 | Mitsubishi Materials Corp | Plate for conveying device, and conveying device |
JP4526854B2 (en) * | 2004-04-08 | 2010-08-18 | ユニバーサル製缶株式会社 | Transport device plate and transport device |
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