JPS54183284U - - Google Patents
Info
- Publication number
- JPS54183284U JPS54183284U JP8126078U JP8126078U JPS54183284U JP S54183284 U JPS54183284 U JP S54183284U JP 8126078 U JP8126078 U JP 8126078U JP 8126078 U JP8126078 U JP 8126078U JP S54183284 U JPS54183284 U JP S54183284U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8126078U JPS54183284U (ja) | 1978-06-14 | 1978-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8126078U JPS54183284U (ja) | 1978-06-14 | 1978-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54183284U true JPS54183284U (ja) | 1979-12-26 |
Family
ID=29000940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8126078U Pending JPS54183284U (ja) | 1978-06-14 | 1978-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54183284U (ja) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213040A (ja) * | 1984-04-09 | 1985-10-25 | Hitachi Ltd | ウエ−ハプロ−バ装置 |
| JPS63108737A (ja) * | 1986-10-27 | 1988-05-13 | Mitsubishi Electric Corp | ウエハプロ−バ装置 |
| JPS63212879A (ja) * | 1987-02-28 | 1988-09-05 | Nec Corp | 半導体受光素子の測定装置 |
| JPH01161174A (ja) * | 1987-12-17 | 1989-06-23 | Tokyo Electron Ltd | プローブ装置 |
| JPH0228344A (ja) * | 1988-07-18 | 1990-01-30 | Tokyo Electron Ltd | 半導体検査装置 |
| JPH07110364A (ja) * | 1994-03-28 | 1995-04-25 | Tokyo Electron Ltd | プローブ装置及びプロービング方法 |
| JP2016178189A (ja) * | 2015-03-19 | 2016-10-06 | 三菱電機株式会社 | マーキング装置、マーキング方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5197372A (ja) * | 1975-02-24 | 1976-08-26 | ||
| JPS51102467A (ja) * | 1975-03-05 | 1976-09-09 | Nippon Electric Co |
-
1978
- 1978-06-14 JP JP8126078U patent/JPS54183284U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5197372A (ja) * | 1975-02-24 | 1976-08-26 | ||
| JPS51102467A (ja) * | 1975-03-05 | 1976-09-09 | Nippon Electric Co |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213040A (ja) * | 1984-04-09 | 1985-10-25 | Hitachi Ltd | ウエ−ハプロ−バ装置 |
| JPS63108737A (ja) * | 1986-10-27 | 1988-05-13 | Mitsubishi Electric Corp | ウエハプロ−バ装置 |
| JPS63212879A (ja) * | 1987-02-28 | 1988-09-05 | Nec Corp | 半導体受光素子の測定装置 |
| JPH01161174A (ja) * | 1987-12-17 | 1989-06-23 | Tokyo Electron Ltd | プローブ装置 |
| JPH0228344A (ja) * | 1988-07-18 | 1990-01-30 | Tokyo Electron Ltd | 半導体検査装置 |
| JPH07110364A (ja) * | 1994-03-28 | 1995-04-25 | Tokyo Electron Ltd | プローブ装置及びプロービング方法 |
| JP2016178189A (ja) * | 2015-03-19 | 2016-10-06 | 三菱電機株式会社 | マーキング装置、マーキング方法 |