JPS54162491A - Semiconductor pressure transducer - Google Patents
Semiconductor pressure transducerInfo
- Publication number
- JPS54162491A JPS54162491A JP7175478A JP7175478A JPS54162491A JP S54162491 A JPS54162491 A JP S54162491A JP 7175478 A JP7175478 A JP 7175478A JP 7175478 A JP7175478 A JP 7175478A JP S54162491 A JPS54162491 A JP S54162491A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- strain
- doughnut
- distribution
- etching groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
PURPOSE: To widen a measureable pressure range with pressure resistance increased apparently, by uniforming pressure distribution by providing a doughnut-shaped etching groove to one side of a diaphragm.
CONSTITUTION: To the 1st main surface of diaphragm 1 of a N(P)-type Si substrate with integrally-formed support parts 1a and 1b, P(N)-type diffusion resistance 2 is provided and to the 2nd main surface of this diaphragm 1, a doughnut-shaped etching groove is provided. With an uniform-distribution load applied, the strain distribution has its peak at its center and an decrease in strain at its circumference. This part is where diaphragm 1 is thicker. As a result, dispersion of strain is caused, eliminating the peak. Consequently, uniform strain distribution can be obtained by providing a doughnut-shaped etching groove with inner circumferential and outer circumferential surfaces equivalent to two concentric circles, link lines of points where radius-directional and circumference-directional stains become zero.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7175478A JPS54162491A (en) | 1978-06-13 | 1978-06-13 | Semiconductor pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7175478A JPS54162491A (en) | 1978-06-13 | 1978-06-13 | Semiconductor pressure transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54162491A true JPS54162491A (en) | 1979-12-24 |
Family
ID=13469630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7175478A Pending JPS54162491A (en) | 1978-06-13 | 1978-06-13 | Semiconductor pressure transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54162491A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154179A (en) * | 1984-12-27 | 1986-07-12 | Nec Corp | Pressure sensor |
JPS61154180A (en) * | 1984-12-27 | 1986-07-12 | Nec Corp | Pressure sensor |
JP2000340805A (en) * | 1999-04-19 | 2000-12-08 | Motorola Inc | Electronic part and manufacture |
JP2007327922A (en) * | 2006-06-09 | 2007-12-20 | Epson Toyocom Corp | Pressure sensor and diaphragm for same |
-
1978
- 1978-06-13 JP JP7175478A patent/JPS54162491A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154179A (en) * | 1984-12-27 | 1986-07-12 | Nec Corp | Pressure sensor |
JPS61154180A (en) * | 1984-12-27 | 1986-07-12 | Nec Corp | Pressure sensor |
JP2000340805A (en) * | 1999-04-19 | 2000-12-08 | Motorola Inc | Electronic part and manufacture |
JP2007327922A (en) * | 2006-06-09 | 2007-12-20 | Epson Toyocom Corp | Pressure sensor and diaphragm for same |
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