JPS54162491A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS54162491A
JPS54162491A JP7175478A JP7175478A JPS54162491A JP S54162491 A JPS54162491 A JP S54162491A JP 7175478 A JP7175478 A JP 7175478A JP 7175478 A JP7175478 A JP 7175478A JP S54162491 A JPS54162491 A JP S54162491A
Authority
JP
Japan
Prior art keywords
diaphragm
strain
doughnut
distribution
etching groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7175478A
Other languages
Japanese (ja)
Inventor
Toru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7175478A priority Critical patent/JPS54162491A/en
Publication of JPS54162491A publication Critical patent/JPS54162491A/en
Pending legal-status Critical Current

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  • Pressure Sensors (AREA)

Abstract

PURPOSE: To widen a measureable pressure range with pressure resistance increased apparently, by uniforming pressure distribution by providing a doughnut-shaped etching groove to one side of a diaphragm.
CONSTITUTION: To the 1st main surface of diaphragm 1 of a N(P)-type Si substrate with integrally-formed support parts 1a and 1b, P(N)-type diffusion resistance 2 is provided and to the 2nd main surface of this diaphragm 1, a doughnut-shaped etching groove is provided. With an uniform-distribution load applied, the strain distribution has its peak at its center and an decrease in strain at its circumference. This part is where diaphragm 1 is thicker. As a result, dispersion of strain is caused, eliminating the peak. Consequently, uniform strain distribution can be obtained by providing a doughnut-shaped etching groove with inner circumferential and outer circumferential surfaces equivalent to two concentric circles, link lines of points where radius-directional and circumference-directional stains become zero.
COPYRIGHT: (C)1979,JPO&Japio
JP7175478A 1978-06-13 1978-06-13 Semiconductor pressure transducer Pending JPS54162491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7175478A JPS54162491A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7175478A JPS54162491A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS54162491A true JPS54162491A (en) 1979-12-24

Family

ID=13469630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7175478A Pending JPS54162491A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS54162491A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154179A (en) * 1984-12-27 1986-07-12 Nec Corp Pressure sensor
JPS61154180A (en) * 1984-12-27 1986-07-12 Nec Corp Pressure sensor
JP2000340805A (en) * 1999-04-19 2000-12-08 Motorola Inc Electronic part and manufacture
JP2007327922A (en) * 2006-06-09 2007-12-20 Epson Toyocom Corp Pressure sensor and diaphragm for same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154179A (en) * 1984-12-27 1986-07-12 Nec Corp Pressure sensor
JPS61154180A (en) * 1984-12-27 1986-07-12 Nec Corp Pressure sensor
JP2000340805A (en) * 1999-04-19 2000-12-08 Motorola Inc Electronic part and manufacture
JP2007327922A (en) * 2006-06-09 2007-12-20 Epson Toyocom Corp Pressure sensor and diaphragm for same

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