JPS5416236B1 - - Google Patents

Info

Publication number
JPS5416236B1
JPS5416236B1 JP8172771A JP8172771A JPS5416236B1 JP S5416236 B1 JPS5416236 B1 JP S5416236B1 JP 8172771 A JP8172771 A JP 8172771A JP 8172771 A JP8172771 A JP 8172771A JP S5416236 B1 JPS5416236 B1 JP S5416236B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8172771A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5416236B1 publication Critical patent/JPS5416236B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/282Static spectrometers using electrostatic analysers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP8172771A 1970-10-19 1971-10-18 Pending JPS5416236B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8195270A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
JPS5416236B1 true JPS5416236B1 (en) 1979-06-20

Family

ID=22167448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8172771A Pending JPS5416236B1 (en) 1970-10-19 1971-10-18

Country Status (8)

Country Link
US (1) US3665185A (en)
JP (1) JPS5416236B1 (en)
CA (1) CA943670A (en)
CH (1) CH542440A (en)
DE (1) DE2152467C3 (en)
FR (1) FR2111481A5 (en)
GB (1) GB1365369A (en)
NL (1) NL7114200A (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920989A (en) * 1974-09-20 1975-11-18 Minnesota Mining & Mfg Ion scattering spectrometer utilizing charge exchange processes
US4249077A (en) * 1978-08-04 1981-02-03 Crawford Charles K Ion charge neutralization for electron beam devices
DE2950330C2 (en) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Device for chemical analysis of samples
US4361762A (en) * 1980-07-30 1982-11-30 Rca Corporation Apparatus and method for neutralizing the beam in an ion implanter
DE3128814A1 (en) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY
FR2542089B1 (en) * 1983-01-14 1985-11-08 Cameca METHOD AND DEVICE FOR IONIC ANALYSIS OF AN INSULATING SAMPLE
JPS60135846A (en) * 1983-12-26 1985-07-19 Anelva Corp Secondary ion mass spectrometer
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
US4680467A (en) * 1986-04-08 1987-07-14 Kevex Corporation Electron spectroscopy system for chemical analysis of electrically isolated specimens
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer
JPH01220350A (en) * 1988-02-26 1989-09-04 Hitachi Ltd Electrification suppression and particle beam radiating device using its device
GB9122161D0 (en) * 1991-10-18 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers
US7320733B2 (en) * 2003-05-09 2008-01-22 Sukegawa Electric Co., Ltd. Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
DE102004014582B4 (en) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ion optical phase volume compression
DE102014118797A1 (en) * 2014-12-17 2016-06-23 Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung Container with an accumulator-operated hot glue gun and hot glue gun with preheat function
CN111383904A (en) * 2015-11-17 2020-07-07 Atonarp株式会社 Analysis apparatus and control method thereof
CN108493091B (en) * 2018-03-09 2020-03-24 中国计量科学研究院 High-electron-utilization-rate low-energy ionization device, mass spectrum system and method
CN114047215B (en) * 2021-10-20 2023-08-15 北京科技大学顺德研究生院 Device and method for eliminating uneven charge on surface of sample to be measured

Also Published As

Publication number Publication date
FR2111481A5 (en) 1972-06-02
GB1365369A (en) 1974-09-04
DE2152467B2 (en) 1980-04-17
DE2152467C3 (en) 1981-01-08
US3665185A (en) 1972-05-23
CA943670A (en) 1974-03-12
CH542440A (en) 1973-09-30
DE2152467A1 (en) 1972-04-20
NL7114200A (en) 1972-04-21

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