JPS5415677A - Manufacture of integrated circuit - Google Patents

Manufacture of integrated circuit

Info

Publication number
JPS5415677A
JPS5415677A JP8084677A JP8084677A JPS5415677A JP S5415677 A JPS5415677 A JP S5415677A JP 8084677 A JP8084677 A JP 8084677A JP 8084677 A JP8084677 A JP 8084677A JP S5415677 A JPS5415677 A JP S5415677A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
mosfet
impurity
injected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8084677A
Other languages
Japanese (ja)
Other versions
JPS571905B2 (en
Inventor
Takashi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8084677A priority Critical patent/JPS5415677A/en
Priority to GB47608/77A priority patent/GB1596184A/en
Priority to NL7713004A priority patent/NL7713004A/en
Priority to DE19772752698 priority patent/DE2752698A1/en
Publication of JPS5415677A publication Critical patent/JPS5415677A/en
Priority to US06/109,100 priority patent/US4297782A/en
Publication of JPS571905B2 publication Critical patent/JPS571905B2/ja
Granted legal-status Critical Current

Links

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To set up the threshold voltage of MOSFET by making use of the phenomenon that the impurity such as the metal which is injected into the insulating film through the recoil injection method has the negative fixed electrode.
COPYRIGHT: (C)1979,JPO&Japio
JP8084677A 1976-11-27 1977-07-06 Manufacture of integrated circuit Granted JPS5415677A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP8084677A JPS5415677A (en) 1977-07-06 1977-07-06 Manufacture of integrated circuit
GB47608/77A GB1596184A (en) 1976-11-27 1977-11-16 Method of manufacturing semiconductor devices
NL7713004A NL7713004A (en) 1976-11-27 1977-11-25 PROCESS FOR MANUFACTURING SEMI-GUIDE DEVICES.
DE19772752698 DE2752698A1 (en) 1976-11-27 1977-11-25 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
US06/109,100 US4297782A (en) 1976-11-27 1980-01-02 Method of manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8084677A JPS5415677A (en) 1977-07-06 1977-07-06 Manufacture of integrated circuit

Publications (2)

Publication Number Publication Date
JPS5415677A true JPS5415677A (en) 1979-02-05
JPS571905B2 JPS571905B2 (en) 1982-01-13

Family

ID=13729705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8084677A Granted JPS5415677A (en) 1976-11-27 1977-07-06 Manufacture of integrated circuit

Country Status (1)

Country Link
JP (1) JPS5415677A (en)

Also Published As

Publication number Publication date
JPS571905B2 (en) 1982-01-13

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