JPS5415677A - Manufacture of integrated circuit - Google Patents
Manufacture of integrated circuitInfo
- Publication number
- JPS5415677A JPS5415677A JP8084677A JP8084677A JPS5415677A JP S5415677 A JPS5415677 A JP S5415677A JP 8084677 A JP8084677 A JP 8084677A JP 8084677 A JP8084677 A JP 8084677A JP S5415677 A JPS5415677 A JP S5415677A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- mosfet
- impurity
- injected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To set up the threshold voltage of MOSFET by making use of the phenomenon that the impurity such as the metal which is injected into the insulating film through the recoil injection method has the negative fixed electrode.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8084677A JPS5415677A (en) | 1977-07-06 | 1977-07-06 | Manufacture of integrated circuit |
GB47608/77A GB1596184A (en) | 1976-11-27 | 1977-11-16 | Method of manufacturing semiconductor devices |
NL7713004A NL7713004A (en) | 1976-11-27 | 1977-11-25 | PROCESS FOR MANUFACTURING SEMI-GUIDE DEVICES. |
DE19772752698 DE2752698A1 (en) | 1976-11-27 | 1977-11-25 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES |
US06/109,100 US4297782A (en) | 1976-11-27 | 1980-01-02 | Method of manufacturing semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8084677A JPS5415677A (en) | 1977-07-06 | 1977-07-06 | Manufacture of integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5415677A true JPS5415677A (en) | 1979-02-05 |
JPS571905B2 JPS571905B2 (en) | 1982-01-13 |
Family
ID=13729705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8084677A Granted JPS5415677A (en) | 1976-11-27 | 1977-07-06 | Manufacture of integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5415677A (en) |
-
1977
- 1977-07-06 JP JP8084677A patent/JPS5415677A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS571905B2 (en) | 1982-01-13 |
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