JPS54153844A - Rotary coating for resist - Google Patents

Rotary coating for resist

Info

Publication number
JPS54153844A
JPS54153844A JP6143878A JP6143878A JPS54153844A JP S54153844 A JPS54153844 A JP S54153844A JP 6143878 A JP6143878 A JP 6143878A JP 6143878 A JP6143878 A JP 6143878A JP S54153844 A JPS54153844 A JP S54153844A
Authority
JP
Japan
Prior art keywords
resist
rotary coating
rotary
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6143878A
Other languages
Japanese (ja)
Inventor
Makoto Nakase
Nobuji Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP6143878A priority Critical patent/JPS54153844A/en
Publication of JPS54153844A publication Critical patent/JPS54153844A/en
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6143878A 1978-05-23 1978-05-23 Rotary coating for resist Pending JPS54153844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6143878A JPS54153844A (en) 1978-05-23 1978-05-23 Rotary coating for resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6143878A JPS54153844A (en) 1978-05-23 1978-05-23 Rotary coating for resist

Publications (1)

Publication Number Publication Date
JPS54153844A true JPS54153844A (en) 1979-12-04

Family

ID=13171062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6143878A Pending JPS54153844A (en) 1978-05-23 1978-05-23 Rotary coating for resist

Country Status (1)

Country Link
JP (1) JPS54153844A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125878A (en) * 1985-11-25 1987-06-08 Mitsubishi Rayon Co Ltd Method for curing coated film
JP2015111312A (en) * 2003-09-29 2015-06-18 Hoya株式会社 Mask blank and method for manufacturing transfer mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125878A (en) * 1985-11-25 1987-06-08 Mitsubishi Rayon Co Ltd Method for curing coated film
JP2015111312A (en) * 2003-09-29 2015-06-18 Hoya株式会社 Mask blank and method for manufacturing transfer mask

Similar Documents

Publication Publication Date Title
JPS5412671A (en) Rotary head for coating resist
GB2025445B (en) Coating composition
GB2038211B (en) Web coating
PT70083A (en) Improved rotary orocessor
GB2037622B (en) Web coating
JPS54101836A (en) Coating composition
GB2022599B (en) Coating composition
GB2029422B (en) Coating composition
JPS5579439A (en) Photosensitive coat composition
GB2026536B (en) Coating composition
DE2960712D1 (en) Rotary valve
JPS54109571A (en) Rotary mandrel unwinder
GB2028925B (en) Rotary positiv-displacement fluidmachines
GB2025444B (en) Coating composition
EP0003638A3 (en) Coating composition
DE2962161D1 (en) Rotary drum
JPS54143338A (en) Rotary printing equipment
GB2026904B (en) Rotary atomiser
GB2036930B (en) Rotary valve
PT69772A (en) Rotary valve
JPS5579733A (en) Retarder for rotary member
JPS5532995A (en) Rotary valve
GB2018902B (en) Rotary fluid-machune
GB2034410B (en) Rotary positivo-displacement fluid-machines
GB2025529B (en) Rotary positivedisplacement fluid-machines