JPS54133881A - Method of forming pattern - Google Patents
Method of forming patternInfo
- Publication number
- JPS54133881A JPS54133881A JP4185878A JP4185878A JPS54133881A JP S54133881 A JPS54133881 A JP S54133881A JP 4185878 A JP4185878 A JP 4185878A JP 4185878 A JP4185878 A JP 4185878A JP S54133881 A JPS54133881 A JP S54133881A
- Authority
- JP
- Japan
- Prior art keywords
- forming pattern
- pattern
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4185878A JPS54133881A (en) | 1978-04-10 | 1978-04-10 | Method of forming pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4185878A JPS54133881A (en) | 1978-04-10 | 1978-04-10 | Method of forming pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54133881A true JPS54133881A (en) | 1979-10-17 |
Family
ID=12619938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4185878A Pending JPS54133881A (en) | 1978-04-10 | 1978-04-10 | Method of forming pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54133881A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5314710A (en) * | 1991-10-02 | 1994-05-24 | Sony Corporation | Insulation layer forming method |
-
1978
- 1978-04-10 JP JP4185878A patent/JPS54133881A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5314710A (en) * | 1991-10-02 | 1994-05-24 | Sony Corporation | Insulation layer forming method |
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