JPS54132807A - Axial sealing device of root type compression transfer pump for gas - Google Patents

Axial sealing device of root type compression transfer pump for gas

Info

Publication number
JPS54132807A
JPS54132807A JP4070478A JP4070478A JPS54132807A JP S54132807 A JPS54132807 A JP S54132807A JP 4070478 A JP4070478 A JP 4070478A JP 4070478 A JP4070478 A JP 4070478A JP S54132807 A JPS54132807 A JP S54132807A
Authority
JP
Japan
Prior art keywords
gas
sealing device
transfer pump
type compression
axial sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4070478A
Other languages
Japanese (ja)
Inventor
Koumei Yokoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anlet Co Ltd
Original Assignee
Anlet Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anlet Co Ltd filed Critical Anlet Co Ltd
Priority to JP4070478A priority Critical patent/JPS54132807A/en
Publication of JPS54132807A publication Critical patent/JPS54132807A/en
Pending legal-status Critical Current

Links

Landscapes

  • Applications Or Details Of Rotary Compressors (AREA)
JP4070478A 1978-04-06 1978-04-06 Axial sealing device of root type compression transfer pump for gas Pending JPS54132807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4070478A JPS54132807A (en) 1978-04-06 1978-04-06 Axial sealing device of root type compression transfer pump for gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4070478A JPS54132807A (en) 1978-04-06 1978-04-06 Axial sealing device of root type compression transfer pump for gas

Publications (1)

Publication Number Publication Date
JPS54132807A true JPS54132807A (en) 1979-10-16

Family

ID=12587952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4070478A Pending JPS54132807A (en) 1978-04-06 1978-04-06 Axial sealing device of root type compression transfer pump for gas

Country Status (1)

Country Link
JP (1) JPS54132807A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119996U (en) * 1983-01-31 1984-08-13 株式会社島津製作所 rotary positive displacement vacuum pump
JPS60145475A (en) * 1983-12-13 1985-07-31 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Double spindle type vacuum pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5053909A (en) * 1973-09-03 1975-05-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5053909A (en) * 1973-09-03 1975-05-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119996U (en) * 1983-01-31 1984-08-13 株式会社島津製作所 rotary positive displacement vacuum pump
JPS60145475A (en) * 1983-12-13 1985-07-31 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Double spindle type vacuum pump

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