JPS54130879A - Method of inactivating surface - Google Patents
Method of inactivating surfaceInfo
- Publication number
- JPS54130879A JPS54130879A JP3858078A JP3858078A JPS54130879A JP S54130879 A JPS54130879 A JP S54130879A JP 3858078 A JP3858078 A JP 3858078A JP 3858078 A JP3858078 A JP 3858078A JP S54130879 A JPS54130879 A JP S54130879A
- Authority
- JP
- Japan
- Prior art keywords
- inactivating
- inactivating surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3858078A JPS54130879A (en) | 1978-04-01 | 1978-04-01 | Method of inactivating surface |
US06/215,442 US4331737A (en) | 1978-04-01 | 1980-12-11 | Oxynitride film and its manufacturing method |
US06/351,619 US4436770A (en) | 1978-04-01 | 1982-02-24 | Oxynitride film and its manufacturing method |
US06/351,618 US4416952A (en) | 1978-04-01 | 1982-02-24 | Oxynitride film and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3858078A JPS54130879A (en) | 1978-04-01 | 1978-04-01 | Method of inactivating surface |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54130879A true JPS54130879A (en) | 1979-10-11 |
Family
ID=12529220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3858078A Pending JPS54130879A (en) | 1978-04-01 | 1978-04-01 | Method of inactivating surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54130879A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4843450A (en) * | 1986-06-16 | 1989-06-27 | International Business Machines Corporation | Compound semiconductor interface control |
US5021365A (en) * | 1986-06-16 | 1991-06-04 | International Business Machines Corporation | Compound semiconductor interface control using cationic ingredient oxide to prevent fermi level pinning |
-
1978
- 1978-04-01 JP JP3858078A patent/JPS54130879A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4843450A (en) * | 1986-06-16 | 1989-06-27 | International Business Machines Corporation | Compound semiconductor interface control |
US5021365A (en) * | 1986-06-16 | 1991-06-04 | International Business Machines Corporation | Compound semiconductor interface control using cationic ingredient oxide to prevent fermi level pinning |
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