JPS54130879A - Method of inactivating surface - Google Patents

Method of inactivating surface

Info

Publication number
JPS54130879A
JPS54130879A JP3858078A JP3858078A JPS54130879A JP S54130879 A JPS54130879 A JP S54130879A JP 3858078 A JP3858078 A JP 3858078A JP 3858078 A JP3858078 A JP 3858078A JP S54130879 A JPS54130879 A JP S54130879A
Authority
JP
Japan
Prior art keywords
inactivating
inactivating surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3858078A
Other languages
Japanese (ja)
Inventor
Jiyunichi Nishizawa
Ikuo Shioda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3858078A priority Critical patent/JPS54130879A/en
Publication of JPS54130879A publication Critical patent/JPS54130879A/en
Priority to US06/215,442 priority patent/US4331737A/en
Priority to US06/351,619 priority patent/US4436770A/en
Priority to US06/351,618 priority patent/US4416952A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP3858078A 1978-04-01 1978-04-01 Method of inactivating surface Pending JPS54130879A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP3858078A JPS54130879A (en) 1978-04-01 1978-04-01 Method of inactivating surface
US06/215,442 US4331737A (en) 1978-04-01 1980-12-11 Oxynitride film and its manufacturing method
US06/351,619 US4436770A (en) 1978-04-01 1982-02-24 Oxynitride film and its manufacturing method
US06/351,618 US4416952A (en) 1978-04-01 1982-02-24 Oxynitride film and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3858078A JPS54130879A (en) 1978-04-01 1978-04-01 Method of inactivating surface

Publications (1)

Publication Number Publication Date
JPS54130879A true JPS54130879A (en) 1979-10-11

Family

ID=12529220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3858078A Pending JPS54130879A (en) 1978-04-01 1978-04-01 Method of inactivating surface

Country Status (1)

Country Link
JP (1) JPS54130879A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4843450A (en) * 1986-06-16 1989-06-27 International Business Machines Corporation Compound semiconductor interface control
US5021365A (en) * 1986-06-16 1991-06-04 International Business Machines Corporation Compound semiconductor interface control using cationic ingredient oxide to prevent fermi level pinning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4843450A (en) * 1986-06-16 1989-06-27 International Business Machines Corporation Compound semiconductor interface control
US5021365A (en) * 1986-06-16 1991-06-04 International Business Machines Corporation Compound semiconductor interface control using cationic ingredient oxide to prevent fermi level pinning

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