JPS54115068A - Device for positioning pattern - Google Patents

Device for positioning pattern

Info

Publication number
JPS54115068A
JPS54115068A JP2314178A JP2314178A JPS54115068A JP S54115068 A JPS54115068 A JP S54115068A JP 2314178 A JP2314178 A JP 2314178A JP 2314178 A JP2314178 A JP 2314178A JP S54115068 A JPS54115068 A JP S54115068A
Authority
JP
Japan
Prior art keywords
positioning pattern
positioning
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2314178A
Other languages
Japanese (ja)
Other versions
JPS5850420B2 (en
Inventor
Yasunobu Suzuki
Akio Bandou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Seisakusho Co Ltd filed Critical Shinkawa Seisakusho Co Ltd
Priority to JP53023141A priority Critical patent/JPS5850420B2/en
Publication of JPS54115068A publication Critical patent/JPS54115068A/en
Publication of JPS5850420B2 publication Critical patent/JPS5850420B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
JP53023141A 1978-02-28 1978-02-28 Pattern alignment device Expired JPS5850420B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53023141A JPS5850420B2 (en) 1978-02-28 1978-02-28 Pattern alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53023141A JPS5850420B2 (en) 1978-02-28 1978-02-28 Pattern alignment device

Publications (2)

Publication Number Publication Date
JPS54115068A true JPS54115068A (en) 1979-09-07
JPS5850420B2 JPS5850420B2 (en) 1983-11-10

Family

ID=12102273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53023141A Expired JPS5850420B2 (en) 1978-02-28 1978-02-28 Pattern alignment device

Country Status (1)

Country Link
JP (1) JPS5850420B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113236A (en) * 1980-12-30 1982-07-14 Fujitsu Ltd Position indicating system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513580A (en) * 1974-05-31 1976-01-13 Western Electric Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513580A (en) * 1974-05-31 1976-01-13 Western Electric Co

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113236A (en) * 1980-12-30 1982-07-14 Fujitsu Ltd Position indicating system

Also Published As

Publication number Publication date
JPS5850420B2 (en) 1983-11-10

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