JPS54115068A - Device for positioning pattern - Google Patents
Device for positioning patternInfo
- Publication number
- JPS54115068A JPS54115068A JP2314178A JP2314178A JPS54115068A JP S54115068 A JPS54115068 A JP S54115068A JP 2314178 A JP2314178 A JP 2314178A JP 2314178 A JP2314178 A JP 2314178A JP S54115068 A JPS54115068 A JP S54115068A
- Authority
- JP
- Japan
- Prior art keywords
- positioning pattern
- positioning
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Wire Bonding (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53023141A JPS5850420B2 (en) | 1978-02-28 | 1978-02-28 | Pattern alignment device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53023141A JPS5850420B2 (en) | 1978-02-28 | 1978-02-28 | Pattern alignment device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54115068A true JPS54115068A (en) | 1979-09-07 |
JPS5850420B2 JPS5850420B2 (en) | 1983-11-10 |
Family
ID=12102273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53023141A Expired JPS5850420B2 (en) | 1978-02-28 | 1978-02-28 | Pattern alignment device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850420B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113236A (en) * | 1980-12-30 | 1982-07-14 | Fujitsu Ltd | Position indicating system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513580A (en) * | 1974-05-31 | 1976-01-13 | Western Electric Co |
-
1978
- 1978-02-28 JP JP53023141A patent/JPS5850420B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513580A (en) * | 1974-05-31 | 1976-01-13 | Western Electric Co |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113236A (en) * | 1980-12-30 | 1982-07-14 | Fujitsu Ltd | Position indicating system |
Also Published As
Publication number | Publication date |
---|---|
JPS5850420B2 (en) | 1983-11-10 |
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