JPS54104859A - Automatic focus detector - Google Patents

Automatic focus detector

Info

Publication number
JPS54104859A
JPS54104859A JP1214478A JP1214478A JPS54104859A JP S54104859 A JPS54104859 A JP S54104859A JP 1214478 A JP1214478 A JP 1214478A JP 1214478 A JP1214478 A JP 1214478A JP S54104859 A JPS54104859 A JP S54104859A
Authority
JP
Japan
Prior art keywords
automatic focus
focus detector
detector
automatic
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1214478A
Other languages
Japanese (ja)
Other versions
JPS6146805B2 (en
Inventor
Takeshi Utagawa
Hiroshi Shirokazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP1214478A priority Critical patent/JPS54104859A/en
Priority to US05/972,261 priority patent/US4264810A/en
Priority to DE19782856233 priority patent/DE2856233A1/en
Publication of JPS54104859A publication Critical patent/JPS54104859A/en
Publication of JPS6146805B2 publication Critical patent/JPS6146805B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
JP1214478A 1977-12-24 1978-02-06 Automatic focus detector Granted JPS54104859A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1214478A JPS54104859A (en) 1978-02-06 1978-02-06 Automatic focus detector
US05/972,261 US4264810A (en) 1977-12-24 1978-12-22 Focus detecting apparatus
DE19782856233 DE2856233A1 (en) 1977-12-24 1978-12-27 DEVICE FOR FOCUSING DETERMINATION IN AN OPTICAL SYSTEM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1214478A JPS54104859A (en) 1978-02-06 1978-02-06 Automatic focus detector

Publications (2)

Publication Number Publication Date
JPS54104859A true JPS54104859A (en) 1979-08-17
JPS6146805B2 JPS6146805B2 (en) 1986-10-16

Family

ID=11797296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1214478A Granted JPS54104859A (en) 1977-12-24 1978-02-06 Automatic focus detector

Country Status (1)

Country Link
JP (1) JPS54104859A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165821A (en) * 1981-04-07 1982-10-13 Nippon Kogaku Kk <Nikon> Ttl automatic focusing device of camera
JPS6119211U (en) * 1984-07-06 1986-02-04 株式会社 コシナ Zoom lens with auto focus
US5172154A (en) * 1990-08-06 1992-12-15 Nikon Corporation System camera
JP2018500598A (en) * 2014-12-22 2018-01-11 エーエスエムエル ネザーランズ ビー．ブイ． Level sensor, lithographic apparatus, and device manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4990529A (en) * 1972-12-27 1974-08-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4990529A (en) * 1972-12-27 1974-08-29

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165821A (en) * 1981-04-07 1982-10-13 Nippon Kogaku Kk <Nikon> Ttl automatic focusing device of camera
JPH0149921B2 (en) * 1981-04-07 1989-10-26 Nippon Kogaku Kk
JPS6119211U (en) * 1984-07-06 1986-02-04 株式会社 コシナ Zoom lens with auto focus
US5172154A (en) * 1990-08-06 1992-12-15 Nikon Corporation System camera
JP2018500598A (en) * 2014-12-22 2018-01-11 エーエスエムエル ネザーランズ ビー．ブイ． Level sensor, lithographic apparatus, and device manufacturing method
US10241425B2 (en) 2014-12-22 2019-03-26 Asml Netherlands B.V. Level sensor, lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPS6146805B2 (en) 1986-10-16

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