JPS539566A - Shape measurement method of electron beams - Google Patents
Shape measurement method of electron beamsInfo
- Publication number
- JPS539566A JPS539566A JP8432776A JP8432776A JPS539566A JP S539566 A JPS539566 A JP S539566A JP 8432776 A JP8432776 A JP 8432776A JP 8432776 A JP8432776 A JP 8432776A JP S539566 A JPS539566 A JP S539566A
- Authority
- JP
- Japan
- Prior art keywords
- measurement method
- electron beams
- shape measurement
- electron beam
- faraday cage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Radiation (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
PURPOSE: Two dimensional shape of an electron beam is measured at high accuracy by masking a part of the inlet of a Faraday cage with a knife edge, letting an electron beam scan in the direction perpendicular to the edge and measuring the output of the Faraday cage.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8432776A JPS539566A (en) | 1976-07-14 | 1976-07-14 | Shape measurement method of electron beams |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8432776A JPS539566A (en) | 1976-07-14 | 1976-07-14 | Shape measurement method of electron beams |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS539566A true JPS539566A (en) | 1978-01-28 |
Family
ID=13827409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8432776A Pending JPS539566A (en) | 1976-07-14 | 1976-07-14 | Shape measurement method of electron beams |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS539566A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02263191A (en) * | 1989-04-03 | 1990-10-25 | Sumitomo Heavy Ind Ltd | Beam advance direction measuring instrument |
US5382895A (en) * | 1992-12-28 | 1995-01-17 | Regents Of The University Of California | System for tomographic determination of the power distribution in electron beams |
US5483036A (en) * | 1993-10-28 | 1996-01-09 | Sandia Corporation | Method of automatic measurement and focus of an electron beam and apparatus therefor |
WO2000072048A1 (en) * | 1999-05-26 | 2000-11-30 | The Regents Of The University Of California | Faraday cup for determination of power density distribution of electron beams |
-
1976
- 1976-07-14 JP JP8432776A patent/JPS539566A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02263191A (en) * | 1989-04-03 | 1990-10-25 | Sumitomo Heavy Ind Ltd | Beam advance direction measuring instrument |
US5382895A (en) * | 1992-12-28 | 1995-01-17 | Regents Of The University Of California | System for tomographic determination of the power distribution in electron beams |
US5483036A (en) * | 1993-10-28 | 1996-01-09 | Sandia Corporation | Method of automatic measurement and focus of an electron beam and apparatus therefor |
WO2000072048A1 (en) * | 1999-05-26 | 2000-11-30 | The Regents Of The University Of California | Faraday cup for determination of power density distribution of electron beams |
US6300755B1 (en) | 1999-05-26 | 2001-10-09 | Regents Of The University Of California | Enhanced modified faraday cup for determination of power density distribution of electron beams |
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