JPS5381150A - Fine adjustment base - Google Patents
Fine adjustment baseInfo
- Publication number
- JPS5381150A JPS5381150A JP15716276A JP15716276A JPS5381150A JP S5381150 A JPS5381150 A JP S5381150A JP 15716276 A JP15716276 A JP 15716276A JP 15716276 A JP15716276 A JP 15716276A JP S5381150 A JPS5381150 A JP S5381150A
- Authority
- JP
- Japan
- Prior art keywords
- fine adjustment
- adjustment base
- stages
- perpendiculayly
- mutually
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: To obtain a fine adjustment base capable of performing highly accurate locating by magnetically performing movement in mutually perpendiculayly intersecting directions of two sets of stages with driving elements respectively symmetrically provided on both sides of the stages without mutual interferences.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15716276A JPS5381150A (en) | 1976-12-25 | 1976-12-25 | Fine adjustment base |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15716276A JPS5381150A (en) | 1976-12-25 | 1976-12-25 | Fine adjustment base |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5381150A true JPS5381150A (en) | 1978-07-18 |
Family
ID=15643531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15716276A Pending JPS5381150A (en) | 1976-12-25 | 1976-12-25 | Fine adjustment base |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5381150A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5544694A (en) * | 1978-09-27 | 1980-03-29 | Nec Corp | X/y table |
JPS5739308U (en) * | 1980-08-18 | 1982-03-03 | ||
JPS5772104U (en) * | 1980-10-21 | 1982-05-01 | ||
JPS5818711A (en) * | 1981-07-27 | 1983-02-03 | Toshiba Corp | Xy table |
JPS6185060A (en) * | 1984-09-29 | 1986-04-30 | Toshiba Corp | Noncontact positioning device |
JPH0662771U (en) * | 1993-02-08 | 1994-09-02 | 鹿島建設株式会社 | Magnetic levitation electromagnetic actuator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4935669A (en) * | 1972-08-15 | 1974-04-02 |
-
1976
- 1976-12-25 JP JP15716276A patent/JPS5381150A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4935669A (en) * | 1972-08-15 | 1974-04-02 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5544694A (en) * | 1978-09-27 | 1980-03-29 | Nec Corp | X/y table |
JPS6120003B2 (en) * | 1978-09-27 | 1986-05-20 | Nippon Electric Co | |
JPS5739308U (en) * | 1980-08-18 | 1982-03-03 | ||
JPS5772104U (en) * | 1980-10-21 | 1982-05-01 | ||
JPS6336241Y2 (en) * | 1980-10-21 | 1988-09-27 | ||
JPS5818711A (en) * | 1981-07-27 | 1983-02-03 | Toshiba Corp | Xy table |
JPS6185060A (en) * | 1984-09-29 | 1986-04-30 | Toshiba Corp | Noncontact positioning device |
JPH0424946B2 (en) * | 1984-09-29 | 1992-04-28 | Tokyo Shibaura Electric Co | |
JPH0662771U (en) * | 1993-02-08 | 1994-09-02 | 鹿島建設株式会社 | Magnetic levitation electromagnetic actuator |
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