JPS5381150A - Fine adjustment base - Google Patents

Fine adjustment base

Info

Publication number
JPS5381150A
JPS5381150A JP15716276A JP15716276A JPS5381150A JP S5381150 A JPS5381150 A JP S5381150A JP 15716276 A JP15716276 A JP 15716276A JP 15716276 A JP15716276 A JP 15716276A JP S5381150 A JPS5381150 A JP S5381150A
Authority
JP
Japan
Prior art keywords
fine adjustment
adjustment base
stages
perpendiculayly
mutually
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15716276A
Other languages
Japanese (ja)
Inventor
Sunao Ishihara
Hideo Watanabe
Takanao Shiratori
Kazuo Tamamushi
Takashi Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP15716276A priority Critical patent/JPS5381150A/en
Publication of JPS5381150A publication Critical patent/JPS5381150A/en
Pending legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To obtain a fine adjustment base capable of performing highly accurate locating by magnetically performing movement in mutually perpendiculayly intersecting directions of two sets of stages with driving elements respectively symmetrically provided on both sides of the stages without mutual interferences.
COPYRIGHT: (C)1978,JPO&Japio
JP15716276A 1976-12-25 1976-12-25 Fine adjustment base Pending JPS5381150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15716276A JPS5381150A (en) 1976-12-25 1976-12-25 Fine adjustment base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15716276A JPS5381150A (en) 1976-12-25 1976-12-25 Fine adjustment base

Publications (1)

Publication Number Publication Date
JPS5381150A true JPS5381150A (en) 1978-07-18

Family

ID=15643531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15716276A Pending JPS5381150A (en) 1976-12-25 1976-12-25 Fine adjustment base

Country Status (1)

Country Link
JP (1) JPS5381150A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544694A (en) * 1978-09-27 1980-03-29 Nec Corp X/y table
JPS5739308U (en) * 1980-08-18 1982-03-03
JPS5772104U (en) * 1980-10-21 1982-05-01
JPS5818711A (en) * 1981-07-27 1983-02-03 Toshiba Corp Xy table
JPS6185060A (en) * 1984-09-29 1986-04-30 Toshiba Corp Noncontact positioning device
JPH0662771U (en) * 1993-02-08 1994-09-02 鹿島建設株式会社 Magnetic levitation electromagnetic actuator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935669A (en) * 1972-08-15 1974-04-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935669A (en) * 1972-08-15 1974-04-02

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544694A (en) * 1978-09-27 1980-03-29 Nec Corp X/y table
JPS6120003B2 (en) * 1978-09-27 1986-05-20 Nippon Electric Co
JPS5739308U (en) * 1980-08-18 1982-03-03
JPS5772104U (en) * 1980-10-21 1982-05-01
JPS6336241Y2 (en) * 1980-10-21 1988-09-27
JPS5818711A (en) * 1981-07-27 1983-02-03 Toshiba Corp Xy table
JPS6185060A (en) * 1984-09-29 1986-04-30 Toshiba Corp Noncontact positioning device
JPH0424946B2 (en) * 1984-09-29 1992-04-28 Tokyo Shibaura Electric Co
JPH0662771U (en) * 1993-02-08 1994-09-02 鹿島建設株式会社 Magnetic levitation electromagnetic actuator

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