JPS5374374A - Rotary vacuum chuck table - Google Patents

Rotary vacuum chuck table

Info

Publication number
JPS5374374A
JPS5374374A JP14972176A JP14972176A JPS5374374A JP S5374374 A JPS5374374 A JP S5374374A JP 14972176 A JP14972176 A JP 14972176A JP 14972176 A JP14972176 A JP 14972176A JP S5374374 A JPS5374374 A JP S5374374A
Authority
JP
Japan
Prior art keywords
chuck table
vacuum chuck
rotary vacuum
forming
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14972176A
Other languages
Japanese (ja)
Inventor
Akira Kabashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14972176A priority Critical patent/JPS5374374A/en
Publication of JPS5374374A publication Critical patent/JPS5374374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To prevent the waterdrop from being left on the adsorption surface of the object to be adsorbed, by forming the radialized adsorption eonvexity on the table surface with the absorbing mouth and forming the waterway between the convexities.
COPYRIGHT: (C)1978,JPO&Japio
JP14972176A 1976-12-15 1976-12-15 Rotary vacuum chuck table Pending JPS5374374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14972176A JPS5374374A (en) 1976-12-15 1976-12-15 Rotary vacuum chuck table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14972176A JPS5374374A (en) 1976-12-15 1976-12-15 Rotary vacuum chuck table

Publications (1)

Publication Number Publication Date
JPS5374374A true JPS5374374A (en) 1978-07-01

Family

ID=15481354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14972176A Pending JPS5374374A (en) 1976-12-15 1976-12-15 Rotary vacuum chuck table

Country Status (1)

Country Link
JP (1) JPS5374374A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183735U (en) * 1983-05-23 1984-12-07 株式会社　デイスコ Adsorption fixing device
JPS6163835U (en) * 1984-09-29 1986-04-30
JPS61148592U (en) * 1985-03-07 1986-09-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498163A (en) * 1972-05-10 1974-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498163A (en) * 1972-05-10 1974-01-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183735U (en) * 1983-05-23 1984-12-07 株式会社　デイスコ Adsorption fixing device
JPS6163835U (en) * 1984-09-29 1986-04-30
JPS61148592U (en) * 1985-03-07 1986-09-12

Similar Documents

Publication Publication Date Title
JPS5212576A (en) Wafer washing drying device
JPS5374374A (en) Rotary vacuum chuck table
JPS51142166A (en) Filter
JPS5231455A (en) Vacuum chuck device
JPS5313045A (en) Air bearing and vacuum adsorption device
JPS5234563A (en) Vacuum cleaner
JPS5228092A (en) Dressing method of grinding wheel
JPS51117991A (en) A process for producing oxygen absorbent
JPS5426064A (en) Vacuum cleaner
JPS5373504A (en) Removal of octafluoroisobutene
JPS5265367A (en) Exhaust apparatus maintaining air-tightness of cyclone
JPS5238679A (en) Fine dust removing device of the type of cyclone
JPS5221574A (en) Vacuum multiplying force device
JPS5228070A (en) Dust collector
JPS5288090A (en) Vacuum pincette
JPS51111968A (en) Dust collector functioning adsorption
JPS5241465A (en) Arm nozzle for a tableware cleaning apparatus
JPS51147851A (en) Material handling device installed on truck, etc., in freely rotary wa y
JPS51131964A (en) Filter device
JPS526170A (en) Filter plate
JPS5243174A (en) Dust collector
JPS5226159A (en) Wafer carrying method
JPS5290870A (en) Filter apparatus
JPS51151911A (en) Object discriminator
JPS51119932A (en) Rotary rectifier