JPS5372683A - Sample analyzer - Google Patents

Sample analyzer

Info

Publication number
JPS5372683A
JPS5372683A JP14779376A JP14779376A JPS5372683A JP S5372683 A JPS5372683 A JP S5372683A JP 14779376 A JP14779376 A JP 14779376A JP 14779376 A JP14779376 A JP 14779376A JP S5372683 A JPS5372683 A JP S5372683A
Authority
JP
Japan
Prior art keywords
image
sample analyzer
display
simultanesouly
confirming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14779376A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishikawa
Sumitaka Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14779376A priority Critical patent/JPS5372683A/en
Publication of JPS5372683A publication Critical patent/JPS5372683A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To display the irradiation spots of the portion being analyzed simultanesouly in the image of the surface of a test piece, while confirming that portion at all times, by driving in a cascade display means for an image of secondary charged particles and means for stopping a bright spot on the surface of the image.
JP14779376A 1976-12-10 1976-12-10 Sample analyzer Pending JPS5372683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14779376A JPS5372683A (en) 1976-12-10 1976-12-10 Sample analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14779376A JPS5372683A (en) 1976-12-10 1976-12-10 Sample analyzer

Publications (1)

Publication Number Publication Date
JPS5372683A true JPS5372683A (en) 1978-06-28

Family

ID=15438325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14779376A Pending JPS5372683A (en) 1976-12-10 1976-12-10 Sample analyzer

Country Status (1)

Country Link
JP (1) JPS5372683A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635041A (en) * 1979-08-31 1981-04-07 Univ Tohoku Analyzing method of state of solid surface and its apparatus
US6739852B1 (en) * 1995-03-09 2004-05-25 Outland Technologies Usa, Inc. Rotary engine and method for determining engagement surface contours therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635041A (en) * 1979-08-31 1981-04-07 Univ Tohoku Analyzing method of state of solid surface and its apparatus
JPH0240972B2 (en) * 1979-08-31 1990-09-14 Tohoku Daigaku Gakucho
US6739852B1 (en) * 1995-03-09 2004-05-25 Outland Technologies Usa, Inc. Rotary engine and method for determining engagement surface contours therefor

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees