JPS5367478A - Pressure detector - Google Patents
Pressure detectorInfo
- Publication number
- JPS5367478A JPS5367478A JP14222176A JP14222176A JPS5367478A JP S5367478 A JPS5367478 A JP S5367478A JP 14222176 A JP14222176 A JP 14222176A JP 14222176 A JP14222176 A JP 14222176A JP S5367478 A JPS5367478 A JP S5367478A
- Authority
- JP
- Japan
- Prior art keywords
- pressure detector
- detector
- pressure
- inducing
- stationalry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To enable the detector to be used for a long time at stable accuracy by forming a semiconductor single crystal with a starin inducing part which induces strain according to pressure and a stationalry part and diffusing a diffused region across the strain inducing part and stationary part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14222176A JPS5367478A (en) | 1976-11-29 | 1976-11-29 | Pressure detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14222176A JPS5367478A (en) | 1976-11-29 | 1976-11-29 | Pressure detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5367478A true JPS5367478A (en) | 1978-06-15 |
JPS5634109B2 JPS5634109B2 (en) | 1981-08-07 |
Family
ID=15310221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14222176A Granted JPS5367478A (en) | 1976-11-29 | 1976-11-29 | Pressure detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5367478A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JPS57197873A (en) * | 1981-05-29 | 1982-12-04 | Hitachi Ltd | Semiconductor pressure detector |
JPS61140934U (en) * | 1985-02-22 | 1986-09-01 |
-
1976
- 1976-11-29 JP JP14222176A patent/JPS5367478A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JPS57197873A (en) * | 1981-05-29 | 1982-12-04 | Hitachi Ltd | Semiconductor pressure detector |
JPH036674B2 (en) * | 1981-05-29 | 1991-01-30 | Hitachi Ltd | |
JPS61140934U (en) * | 1985-02-22 | 1986-09-01 |
Also Published As
Publication number | Publication date |
---|---|
JPS5634109B2 (en) | 1981-08-07 |
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