JPS5366295A - Solid element analytical apparatus - Google Patents
Solid element analytical apparatusInfo
- Publication number
- JPS5366295A JPS5366295A JP14124776A JP14124776A JPS5366295A JP S5366295 A JPS5366295 A JP S5366295A JP 14124776 A JP14124776 A JP 14124776A JP 14124776 A JP14124776 A JP 14124776A JP S5366295 A JPS5366295 A JP S5366295A
- Authority
- JP
- Japan
- Prior art keywords
- solid element
- analytical apparatus
- element analytical
- energy analyzer
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To enable to obtain the element distribution signal, having different depth at the same time, using one primary electron probe, by combining electron energy analyzer and X-ray energy analyzer, in order to take out element analytical signal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14124776A JPS5366295A (en) | 1976-11-26 | 1976-11-26 | Solid element analytical apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14124776A JPS5366295A (en) | 1976-11-26 | 1976-11-26 | Solid element analytical apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366295A true JPS5366295A (en) | 1978-06-13 |
Family
ID=15287494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14124776A Pending JPS5366295A (en) | 1976-11-26 | 1976-11-26 | Solid element analytical apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366295A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55104748A (en) * | 1979-02-06 | 1980-08-11 | Permelec Electrode Ltd | Non dispersion type fluorescence x-ray analyzing device |
-
1976
- 1976-11-26 JP JP14124776A patent/JPS5366295A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55104748A (en) * | 1979-02-06 | 1980-08-11 | Permelec Electrode Ltd | Non dispersion type fluorescence x-ray analyzing device |
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