JPS5362364A - Apparatus for washing sheet-shaped article - Google Patents
Apparatus for washing sheet-shaped articleInfo
- Publication number
- JPS5362364A JPS5362364A JP13631676A JP13631676A JPS5362364A JP S5362364 A JPS5362364 A JP S5362364A JP 13631676 A JP13631676 A JP 13631676A JP 13631676 A JP13631676 A JP 13631676A JP S5362364 A JPS5362364 A JP S5362364A
- Authority
- JP
- Japan
- Prior art keywords
- shaped article
- sheet
- washing sheet
- shaped
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
PURPOSE: To provide an apparatus which makes it possible perform vapor washing of sheet-shaped-article automatically one at a time by means of a table with a sheet-shaped article retaining mechanism provided in such a manner as to be free to rotate and move vertically.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5362364A true JPS5362364A (en) | 1978-06-03 |
JPS5635519B2 JPS5635519B2 (en) | 1981-08-18 |
Family
ID=15172350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13631676A Granted JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5362364A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56168072A (en) * | 1980-05-30 | 1981-12-24 | Hitachi Ltd | Steam drying method and apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0238006Y2 (en) * | 1985-02-07 | 1990-10-15 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4735314U (en) * | 1971-05-12 | 1972-12-19 | ||
JPS4914585A (en) * | 1972-05-20 | 1974-02-08 |
-
1976
- 1976-11-15 JP JP13631676A patent/JPS5362364A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4735314U (en) * | 1971-05-12 | 1972-12-19 | ||
JPS4914585A (en) * | 1972-05-20 | 1974-02-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56168072A (en) * | 1980-05-30 | 1981-12-24 | Hitachi Ltd | Steam drying method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5635519B2 (en) | 1981-08-18 |
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