Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Ebara Corp
Original Assignee
Ebara Corp
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Filing date
Publication date
Application filed by Ebara CorpfiledCriticalEbara Corp
Priority to JP13166676ApriorityCriticalpatent/JPS5357387A/en
Publication of JPS5357387ApublicationCriticalpatent/JPS5357387A/en
PURPOSE: To control the controller by the proper method to provide rotating and straight motion by applying two input element for pilot valve to meet with the requirement.